Shiyuan LIU

Person

Wuhan, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for correcting lithography process hotspots based...
- Patent number 11,687,697
- Issue date Jun 27, 2023
- Wuhan Yuwei Optical Software Co., Ltd.
- Haiqing Wei
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Rapid measurement method for ultra-thin film optical constant
- Patent number 11,662,197
- Issue date May 30, 2023
- Huazhong University of Science & Technology
- Honggang Gu
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring dielectric tensor of material
- Patent number 11,644,413
- Issue date May 9, 2023
- Huazhong University of Science & Technology
- Honggang Gu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Snapshot type overlay error measuring device and measuring method
- Patent number 11,619,883
- Issue date Apr 4, 2023
- Huazhong University of Science & Technology
- Xiuguo Chen
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for real-time attitude angle measurement based on...
- Patent number 11,372,146
- Issue date Jun 28, 2022
- Huazhong University of Science & Technology
- Hao Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Optimization methods of polarization modulator and polarization mea...
- Patent number 11,143,804
- Issue date Oct 12, 2021
- Huazhong University of Science & Technology
- Honggang Gu
- G01 - MEASURING TESTING
Information Patent Grant
Material optical transition analysis method and system
- Patent number 10,983,007
- Issue date Apr 20, 2021
- Huazhong University of Science & Technology
- Honggang Gu
- G01 - MEASURING TESTING
Information Patent Grant
High temporal resolution Mueller matrix elliptical polarization mea...
- Patent number 10,739,251
- Issue date Aug 11, 2020
- Huazhong University of Science and Technology
- Hao Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Mueller-matrix microscope and measurement and calibration methods u...
- Patent number 10,345,568
- Issue date Jul 9, 2019
- WUHAN EOPTICS TECHNOLOGY CO., LTD.
- Xiuguo Chen
- G02 - OPTICS
Information Patent Grant
Method and device for measuring large-area and massive scattered fi...
- Patent number 9,785,047
- Issue date Oct 10, 2017
- Huazhong University of Science & Technology
- Shiyuan Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method for optical axes of composite waveplate
- Patent number 9,103,667
- Issue date Aug 11, 2015
- Huazhong University of Science & Technology
- Shiyuan Liu
- G01 - MEASURING TESTING
Information Patent Grant
Method for extracting critical dimension of semiconductor nanostruc...
- Patent number 9,070,091
- Issue date Jun 30, 2015
- Huazhong University of Science & Technology
- Shiyuan Liu
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
QUASI-DYNAMIC IN SITU ELLIPSOMETRY METHOD AND SYSTEM FOR MEASURING...
- Publication number 20240402614
- Publication date Dec 5, 2024
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Hao Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PTYCHOGRAPHY POSITION CORRECTION BASED ON PROBE WEIGHTING
- Publication number 20240377626
- Publication date Nov 14, 2024
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Honggang Gu
- G02 - OPTICS
Information Patent Application
METHOD AND SYSTEM FOR CORRECTING LITHOGRAPHY PROCESS HOTSPOTS BASED...
- Publication number 20230046115
- Publication date Feb 16, 2023
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Haiqing Wei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SNAPSHOT TYPE OVERLAY ERROR MEASURING DEVICE AND MEASURING METHOD
- Publication number 20220350261
- Publication date Nov 3, 2022
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Xiuguo Chen
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR REAL-TIME ATTITUDE ANGLE MEASUREMENT BASED ON...
- Publication number 20210302640
- Publication date Sep 30, 2021
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Hao Jiang
- G02 - OPTICS
Information Patent Application
METHOD FOR MEASURING DIELECTRIC TENSOR OF MATERIAL
- Publication number 20210262922
- Publication date Aug 26, 2021
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Honggang GU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MATERIAL OPTICAL TRANSITION ANALYSIS METHOD AND SYSTEM
- Publication number 20200333188
- Publication date Oct 22, 2020
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Honggang Gu
- G01 - MEASURING TESTING
Information Patent Application
RAPID MEASUREMENT METHOD FOR ULTRA-THIN FILM OPTICAL CONSTANT
- Publication number 20200333132
- Publication date Oct 22, 2020
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Honggang Gu
- G01 - MEASURING TESTING
Information Patent Application
HIGH TEMPORAL RESOLUTION MUELLER MATRIX ELLIPTICAL POLARIZATION MEA...
- Publication number 20190369006
- Publication date Dec 5, 2019
- HUAZHONG UNIVERSITY OF SCIENCE & TECHNOLOGY
- Hao JIANG
- G01 - MEASURING TESTING
Information Patent Application
POLARIZATION MODULATOR AND POLARIZATION MEASUREMENT SYSTEM
- Publication number 20190361161
- Publication date Nov 28, 2019
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Honggang GU
- G02 - OPTICS
Information Patent Application
MUELLER-MATRIX MICROSCOPE
- Publication number 20180164566
- Publication date Jun 14, 2018
- Wuhan Eoptics Technology Co., Ltd.
- Xiuguo CHEN
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MEASURING LARGE-AREA AND MASSIVE SCATTERED FI...
- Publication number 20160187248
- Publication date Jun 30, 2016
- HUAZHONG UNIVERSITY OF SCIENCE & TECHNOLOGY
- Shiyuan LIU
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT METHOD FOR OPTICAL AXES OF COMPOSITE WAVEPLATE
- Publication number 20150029507
- Publication date Jan 29, 2015
- HUAZHONG UNIVERSITY OF SCIENCE & TECHNOLOGY
- Shiyuan LIU
- G02 - OPTICS
Information Patent Application
METHOD FOR EXTRACTING CRITICAL DIMENSION OF SEMICONDUCTOR NANOSTRUC...
- Publication number 20130325760
- Publication date Dec 5, 2013
- HUAZHONG UNIVERSITY OF SCIENCE & TECHNOLOGY
- Shiyuan LIU
- G06 - COMPUTING CALCULATING COUNTING

Shiyuan LIU

Person

Patents Grantslast 30 patents

Method and system for correcting lithography process hotspots based...

Rapid measurement method for ultra-thin film optical constant

Method for measuring dielectric tensor of material

Snapshot type overlay error measuring device and measuring method

Method and device for real-time attitude angle measurement based on...

Optimization methods of polarization modulator and polarization mea...

Material optical transition analysis method and system

High temporal resolution Mueller matrix elliptical polarization mea...

Mueller-matrix microscope and measurement and calibration methods u...

Method and device for measuring large-area and massive scattered fi...

Alignment method for optical axes of composite waveplate

Method for extracting critical dimension of semiconductor nanostruc...

Patents Applicationslast 30 patents

QUASI-DYNAMIC IN SITU ELLIPSOMETRY METHOD AND SYSTEM FOR MEASURING...

METHOD FOR PTYCHOGRAPHY POSITION CORRECTION BASED ON PROBE WEIGHTING

METHOD AND SYSTEM FOR CORRECTING LITHOGRAPHY PROCESS HOTSPOTS BASED...

SNAPSHOT TYPE OVERLAY ERROR MEASURING DEVICE AND MEASURING METHOD

METHOD AND DEVICE FOR REAL-TIME ATTITUDE ANGLE MEASUREMENT BASED ON...

METHOD FOR MEASURING DIELECTRIC TENSOR OF MATERIAL

MATERIAL OPTICAL TRANSITION ANALYSIS METHOD AND SYSTEM

RAPID MEASUREMENT METHOD FOR ULTRA-THIN FILM OPTICAL CONSTANT

HIGH TEMPORAL RESOLUTION MUELLER MATRIX ELLIPTICAL POLARIZATION MEA...

POLARIZATION MODULATOR AND POLARIZATION MEASUREMENT SYSTEM

MUELLER-MATRIX MICROSCOPE

METHOD AND DEVICE FOR MEASURING LARGE-AREA AND MASSIVE SCATTERED FI...

ALIGNMENT METHOD FOR OPTICAL AXES OF COMPOSITE WAVEPLATE

METHOD FOR EXTRACTING CRITICAL DIMENSION OF SEMICONDUCTOR NANOSTRUC...