SHIZUO OGAWA

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KUMAMOTO-SHI, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for forming coating film and apparatus for curing the coa...
- Patent number 6,673,155
- Issue date Jan 6, 2004
- Tokyo Electron Limited
- Shinji Nagashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for processing a plurality of objects contained in a plurali...
- Patent number 5,980,591
- Issue date Nov 9, 1999
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist processing apparatus having an interface section including t...
- Patent number 5,803,932
- Issue date Sep 8, 1998
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR FORMING COATING FILM AND APPARATUS FOR CURING THE COA...
- Publication number 20030200918
- Publication date Oct 30, 2003
- SHINJI NAGASHIMA
- H01 - BASIC ELECTRIC ELEMENTS