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Shmuel Shmulik Nakash
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Nes-Ziona, IL
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last 30 patents
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Patent Grant
Electrostatic chuck and a method for supporting a wafer
Patent number
8,804,299
Issue date
Aug 12, 2014
Applied Materials Israel, Ltd.
Guy Eytan
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ELECTROSTATIC CHUCK AND A METHOD FOR SUPPORTING A WAFER
Publication number
20120262834
Publication date
Oct 18, 2012
Guy Eytan
H01 - BASIC ELECTRIC ELEMENTS