Sho Kano

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Koshi City, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...
- Publication number 20240006205
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Kenichirou Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...
- Publication number 20240006214
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Shingo Katsuki
- H01 - BASIC ELECTRIC ELEMENTS