Sho Kawatsu

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Ehime, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 10,672,586
- Issue date Jun 2, 2020
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Sho Kawatsu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION GENERATION DEVICE AND ION IMPLANTER
- Publication number 20240266140
- Publication date Aug 8, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Sho KAWATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20190244782
- Publication date Aug 8, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Sho Kawatsu
- H01 - BASIC ELECTRIC ELEMENTS