Sho Oikawa

Follow

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing method and plasma processing apparatus
- Patent number 11,721,595
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Sho Oikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target object processing method and plasma processing apparatus
- Patent number 11,610,766
- Issue date Mar 21, 2023
- Tokyo Electron Limited
- Seiji Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and substrate processing apparatus
- Patent number 11,328,934
- Issue date May 10, 2022
- Tokyo Electron Limited
- Sho Oikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and plasma processing apparatus
- Patent number 11,211,229
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Sho Oikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200411326
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Sho OIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200227241
- Publication date Jul 16, 2020
- TOKYO ELECTRON LIMITED
- Sho OIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200227326
- Publication date Jul 16, 2020
- TOKYO ELECTRON LIMITED
- Sho OIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200168468
- Publication date May 28, 2020
- TOKYO ELECTRON LIMITED
- Takayuki ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET OBJECT PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200144034
- Publication date May 7, 2020
- TOKYO ELECTRON LIMITED
- Seiji Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS