Sho SAITOH

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method and substrate processing apparatus
- Patent number 11,810,792
- Issue date Nov 7, 2023
- Tokyo Electron Limited
- Takanori Eto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240429027
- Publication date Dec 26, 2024
- TOKYO ELECTRON LIMITED
- Noriyuki SAKAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240213031
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Atsuki HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
- Publication number 20230268190
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Atsuki HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220084836
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Takanori ETO
- H01 - BASIC ELECTRIC ELEMENTS