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Sho TOMINAGA

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  • Miyagi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD OF ETCHING SILICON CONTAINING FILMS SELECTIVELY AGAINST EACH...
    • Publication number 20210104413
    • Publication date Apr 8, 2021
    • TOKYO ELECTRON LIMITED
    • Taku Gohira
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF ETCHING SILICON CONTAINING FILMS SELECTIVELY AGAINST EACH...
    • Publication number 20190244829
    • Publication date Aug 8, 2019
    • TOKYO ELECTRON LIMITED
    • Taku Gohira
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20180261465
    • Publication date Sep 13, 2018
    • TOKYO ELECTRON LIMITED
    • Ryohei TAKEDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20180226264
    • Publication date Aug 9, 2018
    • TOKYO ELECTRON LIMITED
    • Wataru TAKAYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF ETCHING SILICON OXIDE AND SILICON NITRIDE SELECTIVELY AGA...
    • Publication number 20180076048
    • Publication date Mar 15, 2018
    • TOKYO ELECTRON LIMITED
    • Taku Gohira
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20170178921
    • Publication date Jun 22, 2017
    • TOKYO ELECTRON LIMITED
    • Ryohei TAKEDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20170162399
    • Publication date Jun 8, 2017
    • TOKYO ELECTRON LIMITED
    • Wataru TAKAYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20160314986
    • Publication date Oct 27, 2016
    • TOKYO ELECTRON LIMITED
    • Sho TOMINAGA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20160064245
    • Publication date Mar 3, 2016
    • TOKYO ELECTRON LIMITED
    • Yusuke SAITOH
    • H01 - BASIC ELECTRIC ELEMENTS