Sho Watanabe

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 10,373,849
- Issue date Aug 6, 2019
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180061688
- Publication date Mar 1, 2018
- TOKYO ELECTRON LIMITED
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160020122
- Publication date Jan 21, 2016
- TOKYO ELECTRON LIMITED
- Sho Watanabe
- H01 - BASIC ELECTRIC ELEMENTS