Shogo Fukui

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,237,177
- Issue date Feb 25, 2025
- Tokyo Electron Limited
- Shogo Fukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate drying method
- Patent number 11,715,648
- Issue date Aug 1, 2023
- Tokyo Electron Limited
- Katsuya Nakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid supply device and liquid supply method
- Patent number 11,626,298
- Issue date Apr 11, 2023
- Tokyo Electron Limited
- Yusuke Takamatsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of cleaning substrate processing apparatus, and substrate pr...
- Patent number 11,515,142
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Shogo Fukui
- B08 - CLEANING
Information Patent Grant
Method of removing particles of substrate processing apparatus, and...
- Patent number 11,344,931
- Issue date May 31, 2022
- Tokyo Electron Limited
- Shogo Fukui
- B08 - CLEANING
Information Patent Grant
Substrate processing method, recording medium and substrate process...
- Patent number 11,133,176
- Issue date Sep 28, 2021
- Tokyo Electron Limited
- Kento Tsukano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,084,072
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Shogo Fukui
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,553,421
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Seiki Ishida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230005763
- Publication date Jan 5, 2023
- TOKYO ELECTRON LIMITED
- Kazuki KOSAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220254658
- Publication date Aug 11, 2022
- TOKYO ELECTRON LIMITED
- Shogo Fukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID SUPPLY DEVICE AND LIQUID SUPPLY METHOD
- Publication number 20210111043
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Yusuke TAKAMATSU
- B08 - CLEANING
Information Patent Application
METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PR...
- Publication number 20210082691
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Shogo FUKUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE DRYING METHOD
- Publication number 20210043471
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Katsuya NAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REMOVING PARTICLES OF SUBSTRATE PROCESSING APPARATUS, AND...
- Publication number 20200047224
- Publication date Feb 13, 2020
- TOKYO ELECTRON LIMITED
- Shogo Fukui
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...
- Publication number 20190051519
- Publication date Feb 14, 2019
- TOKYO ELECTRON LIMITED
- Kento Tsukano
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20180200764
- Publication date Jul 19, 2018
- TOKYO ELECTRON LIMITED
- Shogo Fukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20160336170
- Publication date Nov 17, 2016
- TOKYO ELECTRON LIMITED
- Seiki Ishida
- B08 - CLEANING

Shogo Fukui

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate drying method

Liquid supply device and liquid supply method

Method of cleaning substrate processing apparatus, and substrate pr...

Method of removing particles of substrate processing apparatus, and...

Substrate processing method, recording medium and substrate process...

Substrate processing apparatus, substrate processing method and rec...

Substrate processing apparatus, substrate processing method and sto...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LIQUID SUPPLY DEVICE AND LIQUID SUPPLY METHOD

METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PR...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE DRYING METHOD

METHOD OF REMOVING PARTICLES OF SUBSTRATE PROCESSING APPARATUS, AND...

SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...