Shogo Inaba

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Coating film forming method
- Patent number 11,557,495
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Shogo Inaba
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating treatment method, computer storage medium and coating treat...
- Patent number 11,065,639
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Shogo Inaba
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Development processing apparatus, development processing method, an...
- Patent number 10,359,702
- Issue date Jul 23, 2019
- Tokyo Electron Limited
- Takeshi Shimoaoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
COATING FILM FORMING METHOD AND COATING FILM FORMING APPARATUS
- Publication number 20200234979
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Shogo INABA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND COATING TREAT...
- Publication number 20200147637
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Shogo INABA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPMENT PROCESSING APPARATUS, DEVELOPMENT PROCESSING METHOD, AN...
- Publication number 20190146344
- Publication date May 16, 2019
- TOKYO ELECTRON LIMITED
- Takeshi Shimoaoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY