Shogo KITASAKA

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Oyama-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20240126185
- Publication date Apr 18, 2024
- Gigaphoton Inc.
- Yoshifumi UENO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20230413411
- Publication date Dec 21, 2023
- Gigaphoton Inc.
- Shogo KITASAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20230300966
- Publication date Sep 21, 2023
- Gigaphoton Inc.
- Shogo KITASAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
- Publication number 20230284365
- Publication date Sep 7, 2023
- Gigaphoton Inc.
- Yuichi NISHIMURA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR