TREA

Shogo Mizota

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  • Hillsboro, OR, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate cleaning method
    • Patent number 7,678,199
    • Issue date Mar 16, 2010
    • Tokyo Electron Limited
    • Shogo Mizota
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE CLEANING METHOD
    • Publication number 20080053489
    • Publication date Mar 6, 2008
    • TOKYO ELECTRON LIMITED
    • Shogo Mizota
    • H01 - BASIC ELECTRIC ELEMENTS