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Shogo Takahashi
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Koshi City, JP
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last 30 patents
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Patent Grant
Nozzle unit, liquid treatment apparatus, and liquid treatment method
Patent number
12,072,625
Issue date
Aug 27, 2024
Tokyo Electron Limited
Takuya Miura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Liquid processing method, memory medium and liquid processing appar...
Patent number
9,972,512
Issue date
May 15, 2018
Tokyo Electron Limited
Akiko Kai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Liquid processing method, memory medium and liquid processing appar...
Patent number
9,786,488
Issue date
Oct 10, 2017
Tokyo Electron Limited
Akiko Kai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
LIQUID TREATMENT METHOD AND STORAGE MEDIUM
Publication number
20240361687
Publication date
Oct 31, 2024
TOKYO ELECTRON LIMITED
Takuya MIURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
NOZZLE UNIT, LIQUID TREATMENT APPARATUS, AND LIQUID TREATMENT METHOD
Publication number
20210333707
Publication date
Oct 28, 2021
TOKYO ELECTRON LIMITED
Takuya MIURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
Publication number
20180019112
Publication date
Jan 18, 2018
TOKYO ELECTRON LIMITED
Akiko KAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
Publication number
20160096203
Publication date
Apr 7, 2016
TOKYO ELECTRON LIMITED
Akiko Kai
B08 - CLEANING