Shohei Shima

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for determining a cleanliness of a cleaning member
- Patent number 12,101,073
- Issue date Sep 24, 2024
- Ebara Corporation
- Chikako Takatoh
- B08 - CLEANING
Information Patent Grant
Apparatus and method for surface treatment of substrate, and substr...
- Patent number 8,205,625
- Issue date Jun 26, 2012
- Ebara Corporation
- Hideki Tateishi
- B24 - GRINDING POLISHING
Information Patent Grant
Method of polishing thin film formed on substrate
- Patent number 7,262,849
- Issue date Aug 28, 2007
- Ebara Corporation
- Shohei Shima
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR DETERMINING CLEANLINESS OF CLEANING MEMBER, METHOD FOR D...
- Publication number 20210384881
- Publication date Dec 9, 2021
- EBARA CORPORATION
- Chikako Takatoh
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, SUBSTRATE...
- Publication number 20200116480
- Publication date Apr 16, 2020
- EBARA CORPORATION
- Shohei Shima
- B82 - NANO-TECHNOLOGY
Information Patent Application
Film Thickness Measuring Method and Substrate Processing Apparatus
- Publication number 20100097607
- Publication date Apr 22, 2010
- Akira Susaki
- G01 - MEASURING TESTING
Information Patent Application
Polishing method and apparatus
- Publication number 20090197510
- Publication date Aug 6, 2009
- Shohei Shima
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus and method for surface treatment of substrate, and substr...
- Publication number 20080124932
- Publication date May 29, 2008
- Hideki Tateishi
- B24 - GRINDING POLISHING
Information Patent Application
Substrate Processing Apparatus
- Publication number 20070289604
- Publication date Dec 20, 2007
- Yukio Fukunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of polishing thin film formed on substrate
- Publication number 20050254051
- Publication date Nov 17, 2005
- Shohei Shima
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20040219298
- Publication date Nov 4, 2004
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shohei Shima

Person

Patents Grantslast 30 patents

Method for determining a cleanliness of a cleaning member

Apparatus and method for surface treatment of substrate, and substr...

Method of polishing thin film formed on substrate

Patents Applicationslast 30 patents

METHOD FOR DETERMINING CLEANLINESS OF CLEANING MEMBER, METHOD FOR D...

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, SUBSTRATE...

Film Thickness Measuring Method and Substrate Processing Apparatus

Polishing method and apparatus

Apparatus and method for surface treatment of substrate, and substr...

Substrate Processing Apparatus

Method of polishing thin film formed on substrate

Substrate processing method and substrate processing apparatus