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Shohei TAKEDA
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Wafer cleaning apparatus
Patent number
11,881,418
Issue date
Jan 23, 2024
Disco Corporation
Shohei Takeda
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
METHOD OF PROCESSING PLATE-SHAPED WORKPIECE
Publication number
20230099416
Publication date
Mar 30, 2023
Disco Corporation
Nobuyuki FUKUSHI
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD OF PROCESSING PLATE-SHAPED WORKPIECE
Publication number
20230095361
Publication date
Mar 30, 2023
Disco Corporation
Nobuyuki FUKUSHI
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
WAFER CLEANING APPARATUS
Publication number
20220005710
Publication date
Jan 6, 2022
Disco Corporation
Shohei TAKEDA
H01 - BASIC ELECTRIC ELEMENTS