Shohei YAMAUCHI

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, substrate processing apparatus, and me...
- Patent number 12,165,848
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Kenichi Oyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ME...
- Publication number 20220406572
- Publication date Dec 22, 2022
- Tokyo Electron Limited
- Kenichi OYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20120220132
- Publication date Aug 30, 2012
- TOKYO ELECTRON LIMITED
- Kenichi OYAMA
- H01 - BASIC ELECTRIC ELEMENTS