Shoichi Harakawa

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Process control system, process control method, and method of manuf...
- Patent number 7,831,330
- Issue date Nov 9, 2010
- Kabushiki Kaisha Toshiba
- Junji Sugamoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Exposure processing system, exposure processing method and method f...
- Patent number 7,630,052
- Issue date Dec 8, 2009
- Kabushiki Kaisha Toshiba
- Takuya Kono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process control system, process control method, and method of manuf...
- Patent number 7,596,421
- Issue date Sep 29, 2009
- Kabushik Kaisha Toshiba
- Junji Sugamoto
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
System for controlling an overlay, method for controlling overlay,...
- Patent number 7,556,899
- Issue date Jul 7, 2009
- Kabushiki Kaisha Toshiba
- Makoto Ikeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
FLOW CONVERSION SYSTEM FOR A MANUFACTURING PROCESS, METHOD FOR CONV...
- Patent number 6,925,343
- Issue date Aug 2, 2005
- Kabushiki Kaisha Toshiba
- Yuichi Satoguchi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Semiconductor processing process control system and its control method
- Patent number 6,853,870
- Issue date Feb 8, 2005
- Kabushiki Kaisha Toshiba
- Shoichi Harakawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Semiconductor processing process control system and its control method
- Patent number 6,745,094
- Issue date Jun 1, 2004
- Kabushiki Kaisha Toshiba
- Shoichi Harakawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Semiconductor device manufacturing method, manufacturing system, su...
- Patent number 6,505,090
- Issue date Jan 7, 2003
- Kabushiki Kaisha Toshiba
- Shoichi Harakawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Process control system, process control method, and method of manuf...
- Publication number 20090276078
- Publication date Nov 5, 2009
- Kabushiki Kaisha Toshiba
- Junji Sugamoto
- G05 - CONTROLLING REGULATING
Information Patent Application
System for controlling production of electronic devices, system and...
- Publication number 20070233302
- Publication date Oct 4, 2007
- Kunihiro Miyazaki
- G05 - CONTROLLING REGULATING
Information Patent Application
Exposure apparatus correction system, exposure apparatus correcting...
- Publication number 20070020537
- Publication date Jan 25, 2007
- Shoichi Harakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process control system, process control method, and method of manuf...
- Publication number 20060287754
- Publication date Dec 21, 2006
- Junji Sugamoto
- G05 - CONTROLLING REGULATING
Information Patent Application
System for controlling an overlay, method for controlling overlay,...
- Publication number 20060265686
- Publication date Nov 23, 2006
- Makoto Ikeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure processing system, exposure processing method and method f...
- Publication number 20050170262
- Publication date Aug 4, 2005
- Takuya Kono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Flow conversion system for a manufacturing process, method for conv...
- Publication number 20040236449
- Publication date Nov 25, 2004
- Kabushiki Kaisha Toshiba
- Yuichi Satoguchi
- G05 - CONTROLLING REGULATING
Information Patent Application
Semiconductor processing process control system and its control method
- Publication number 20040186610
- Publication date Sep 23, 2004
- Kabushiki Kaisha Toshiba
- Shoichi Harakawa
- G05 - CONTROLLING REGULATING

Shoichi Harakawa

Person

Patents Grantslast 30 patents

Process control system, process control method, and method of manuf...

Exposure processing system, exposure processing method and method f...

Process control system, process control method, and method of manuf...

System for controlling an overlay, method for controlling overlay,...

FLOW CONVERSION SYSTEM FOR A MANUFACTURING PROCESS, METHOD FOR CONV...

Semiconductor processing process control system and its control method

Semiconductor processing process control system and its control method

Semiconductor device manufacturing method, manufacturing system, su...

Patents Applicationslast 30 patents

Process control system, process control method, and method of manuf...

System for controlling production of electronic devices, system and...

Exposure apparatus correction system, exposure apparatus correcting...

Process control system, process control method, and method of manuf...

System for controlling an overlay, method for controlling overlay,...

Exposure processing system, exposure processing method and method f...

Flow conversion system for a manufacturing process, method for conv...

Semiconductor processing process control system and its control method