Shoichi Kodama

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for dry-in, dry-out polishing and washing of a...
- Patent number 7,708,618
- Issue date May 4, 2010
- Ebara Corporation
- Hiromi Yajima
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 7,198,552
- Issue date Apr 3, 2007
- Ebara Corporation
- Toyomi Nishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and a method of polishing and cleaning and dryi...
- Patent number 6,997,782
- Issue date Feb 14, 2006
- Ebara Corporation
- Toyomi Nishi
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for conveying a workpiece
- Patent number 6,595,220
- Issue date Jul 22, 2003
- Ebara Corporation
- Toshiro Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and method
- Patent number 6,500,051
- Issue date Dec 31, 2002
- Ebara Corporation
- Toyomi Nishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,413,154
- Issue date Jul 2, 2002
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conveying a workpiece
- Patent number 6,221,171
- Issue date Apr 24, 2001
- Ebara Corporation
- Toshiro Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing facility
- Patent number 5,827,110
- Issue date Oct 27, 1998
- Kabushiki Kaisha Toshiba
- Hiromi Yajima
- B08 - CLEANING
Information Patent Grant
Polishing apparatus including cloth cartridge connected to turntable
- Patent number 5,704,827
- Issue date Jan 6, 1998
- Ebara Corporation
- Toyomi Nishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing aparatus and method
- Patent number 5,679,059
- Issue date Oct 21, 1997
- Ebara Corporation
- Toyomi Nishi
- B08 - CLEANING
Information Patent Grant
Apparatus for transferring semiconductor wafers
- Patent number 5,180,273
- Issue date Jan 19, 1993
- Kabushiki Kaisha Toshiba
- Kazuhiro Sakaya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for dry-in, dry-out polishing and washing of a...
- Publication number 20080166949
- Publication date Jul 10, 2008
- Hiromi Yajima
- B08 - CLEANING
Information Patent Application
Polishing apparatus
- Publication number 20060084369
- Publication date Apr 20, 2006
- Toyomi Nishi
- B08 - CLEANING
Information Patent Application
Polishing apparatus and a method of polishing and cleaning and dryi...
- Publication number 20030040261
- Publication date Feb 27, 2003
- Toyomi Nishi
- F24 - HEATING RANGES VENTILATING
Information Patent Application
Apparatus for conveying a workpiece
- Publication number 20010009157
- Publication date Jul 26, 2001
- Toshiro Maekawa
- H01 - BASIC ELECTRIC ELEMENTS

Shoichi Kodama

Person

Patents Grantslast 30 patents

Method and apparatus for dry-in, dry-out polishing and washing of a...

Polishing apparatus

Polishing apparatus and a method of polishing and cleaning and dryi...

Apparatus for conveying a workpiece

Polishing apparatus and method

Polishing apparatus

Method and apparatus for conveying a workpiece

Polishing facility

Polishing apparatus including cloth cartridge connected to turntable

Polishing aparatus and method

Apparatus for transferring semiconductor wafers

Patents Applicationslast 30 patents

Method and apparatus for dry-in, dry-out polishing and washing of a...

Polishing apparatus

Polishing apparatus and a method of polishing and cleaning and dryi...

Apparatus for conveying a workpiece