Shoichi Murakami

Person

  • Amagasaki-shi, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD FOR PRODUCING SILICON NITRIDE FILM AND SILICON NITRIDE FILM

    • Publication number 20190088465
    • Publication date Mar 21, 2019
    • Taiyo Nippon Sanso Corporation
    • Hiroshi TAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SILICON NITRIDE FILM, PRODUCTION METHOD THEREFOR, AND PRODUCTION DE...

    • Publication number 20160251224
    • Publication date Sep 1, 2016
    • SPP TECHNOLOGIES CO., LTD.
    • Shoichi Murakami
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS, METHOD AND PROGRAM FOR MANUFACTURING NITRIDE FILM

    • Publication number 20140220711
    • Publication date Aug 7, 2014
    • SPP Technologies Co., Ltd.
    • Shoichi Murakami
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma Etching Method

    • Publication number 20140187048
    • Publication date Jul 3, 2014
    • SPP TECHNOLOGIES CO., LTD.
    • Shoichi Murakami
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Etching Method

    • Publication number 20130115772
    • Publication date May 9, 2013
    • SPP TECHNOLOGIES CO., LTD.
    • Akimitsu Oishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Deposition Method

    • Publication number 20120258604
    • Publication date Oct 11, 2012
    • SPP TECHNOLOGIES CO., LTD.
    • Masayasu Hatashita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma Etching Method

    • Publication number 20120052688
    • Publication date Mar 1, 2012
    • SUMITOMO PRECISION PRODUCTS CO., LTD.
    • Akimitsu Oishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD CAPABLE OF DETECTING END POINT AND PLASMA ETC...

    • Publication number 20090277872
    • Publication date Nov 12, 2009
    • Sumitomo Precision Products Co., Ltd.
    • Takashi Yamamoto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma generator and plasma etching apparatus

    • Publication number 20070086143
    • Publication date Apr 19, 2007
    • Sumitomo Precision Products Co., Ltd.
    • Yasuyuki Hayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Etching Method and Etching Apparatus

    • Publication number 20070023394
    • Publication date Feb 1, 2007
    • Sumitomo Precision Products Co., Ltd.
    • Shoichi Murakami
    • H01 - BASIC ELECTRIC ELEMENTS