Shoichiro HIDAKA

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KOshi-City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,735,428
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Shoichiro Hidaka
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,469,116
- Issue date Oct 11, 2022
- Tokyo Electron Limited
- Shoichiro Hidaka
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,430,662
- Issue date Aug 30, 2022
- Tokyo Electron Limited
- Shoichiro Hidaka
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220359218
- Publication date Nov 10, 2022
- TOKYO ELECTRON LIMITED
- Shoichiro Hidaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210134600
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Shoichiro Hidaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200035516
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Boui Ikeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200035517
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Shoichiro HIDAKA
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20100307539
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Nobuhiko MOURI
- B08 - CLEANING