Shoichiro Kumamoto

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Shizuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for the formation of Co film and method for the formation of...
- Patent number 8,809,193
- Issue date Aug 19, 2014
- ULVAC, Inc.
- Shoichiro Kumamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming Cu electrical interconnection film
- Patent number 8,476,161
- Issue date Jul 2, 2013
- Ulvac, Inc.
- Shoichiro Kumamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR THE FORMATION OF CO FILM AND METHOD FOR THE FORMATION OF...
- Publication number 20130023116
- Publication date Jan 24, 2013
- Ulvac, Inc.
- Shoichiro Kumamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING CU ELECTRICAL INTERCONNECTION FILM
- Publication number 20110104890
- Publication date May 5, 2011
- Ulvac, Inc.
- Shoichiro Kumamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...