Shoji Aoki

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Aichi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Platen for electrostatic wafer clamping apparatus
- Patent number 6,660,665
- Issue date Dec 9, 2003
- Japan Fine Ceramics Center
- Hiroaki Yanagida
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
PLATEN FOR ELECTROSTATIC WAFER CLAMPING APPARATUS
- Publication number 20030207596
- Publication date Nov 6, 2003
- Hiroaki Yanagida
- H01 - BASIC ELECTRIC ELEMENTS