Shoji Aoki

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Patents Grantslast 30 patents

Information Patent Grant
Mn-containing copper alloy sputtering target generating few particles
- Patent number 9,028,658
- Issue date May 12, 2015
- Mitsubishi Materials Corporation
- Shoji Aoki
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...

Patents Applicationslast 30 patents

Information Patent Application
Mn-CONTAINING COPPER ALLOY SPUTTERING TARGET GENERATING FEW PARTICLES
- Publication number 20090101495
- Publication date Apr 23, 2009
- MITSUBISHI MATERIALS CORPORATION
- Shoji Aoki
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...