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Shoji Hotta
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Measurement system and measurement method
Patent number
10,002,743
Issue date
Jun 19, 2018
Hitachi High-Technologies Corporation
Shoji Hotta
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Charged particle beam apparatus and inspection method using the same
Patent number
9,659,744
Issue date
May 23, 2017
Hitachi High-Technologies Corporation
Natsuki Tsuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor device
Patent number
7,419,916
Issue date
Sep 2, 2008
Renesas Technology Corp.
Junji Noguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor integrated circuit device
Patent number
7,387,867
Issue date
Jun 17, 2008
Hitachi, Ltd.
Norio Hasegawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor device
Patent number
7,109,127
Issue date
Sep 19, 2006
Renesas Technology Corp.
Junji Noguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabrication method of semiconductor integrated circuit device and mask
Patent number
6,939,649
Issue date
Sep 6, 2005
Renesas Technology Corp.
Shoji Hotta
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fabrication method of semiconductor integrated circuit device
Patent number
6,656,646
Issue date
Dec 2, 2003
Hitachi, Ltd.
Shoji Hotta
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor device and method of manufacturing the same
Patent number
6,555,464
Issue date
Apr 29, 2003
Hitachi, Ltd.
Shinichi Fukada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
6,528,400
Issue date
Mar 4, 2003
Hitachi, Ltd.
Shinichi Fukada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
6,340,632
Issue date
Jan 22, 2002
Hitachi, Ltd.
Shinichi Fukada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MEASUREMENT SYSTEM AND MEASUREMENT METHOD
Publication number
20170047197
Publication date
Feb 16, 2017
Hitachi High-Technologies Corporation
Shoji HOTTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND INSPECTION METHOD USING THE SAME
Publication number
20160148781
Publication date
May 26, 2016
Hitachi High-Technologies Corporation
Natsuki TSUNO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Manufacturing method of semiconductor device
Publication number
20070004189
Publication date
Jan 4, 2007
Junji Noguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Manufacturing method of semiconductor device
Publication number
20050118809
Publication date
Jun 2, 2005
Junji Noguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Manufacturing method of semiconductor integrated circuit device
Publication number
20050090120
Publication date
Apr 28, 2005
Norio Hasegawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Semiconductor device and method of manufacturing the same
Publication number
20030139031
Publication date
Jul 24, 2003
Shinichi Fukada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fabrication method of semiconductor integrated circuit device and mask
Publication number
20030073038
Publication date
Apr 17, 2003
Shoji Hotta
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Fabrication method of semiconductor integrated circuit device
Publication number
20030044721
Publication date
Mar 6, 2003
Hitachi, Ltd.
Shoji Hotta
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of manufacturing a semiconductor device
Publication number
20020076921
Publication date
Jun 20, 2002
Shinichi Fukada
H01 - BASIC ELECTRIC ELEMENTS