Shoji HOTTA

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Delmar, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam measurement apparatus
- Patent number 8,575,547
- Issue date Nov 5, 2013
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for pattern position and overlay measurement
- Patent number 8,148,682
- Issue date Apr 3, 2012
- Hitachi, Ltd.
- Shoji Hotta
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method and its system
- Patent number 7,943,903
- Issue date May 17, 2011
- Hitachi High-Technologies Corporation
- Shinji Okazaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron beam measurement apparatus
- Patent number 7,884,325
- Issue date Feb 8, 2011
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus for Pattern Position and Overlay Measurement
- Publication number 20110155904
- Publication date Jun 30, 2011
- Hitachi, Ltd.
- Shoji HOTTA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRON BEAM MEASUREMENT APPARATUS
- Publication number 20110095183
- Publication date Apr 28, 2011
- Hitachi High-Technologies Corporation
- Yasunari SOHDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect inspection method and its system
- Publication number 20090206252
- Publication date Aug 20, 2009
- Hitachi High-Technologies Corporation
- Shinji Okazaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRON BEAM MEASUREMENT APPARATUS
- Publication number 20090146057
- Publication date Jun 11, 2009
- Yasunari SOHDA
- G06 - COMPUTING CALCULATING COUNTING