Shoji Kano

Person

Gunma-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Tantalum carbide coated carbon material, manufacturing method there...
- Patent number 11,555,255
- Issue date Jan 17, 2023
- Shin-Etsu Chemical Co., Ltd.
- Chikara Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic heater
- Patent number 9,351,344
- Issue date May 24, 2016
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Corrosion-resistant multilayer ceramic member
- Patent number 8,829,397
- Issue date Sep 9, 2014
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for forming an aluminum nitride thin film
- Patent number 8,440,566
- Issue date May 14, 2013
- Shin-Etsu Chemical Co., Ltd.
- Koji Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating element
- Patent number 8,115,141
- Issue date Feb 14, 2012
- Shin-Etsu Chemical Co., Ltd.
- Noboru Kimura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heating element
- Patent number 7,952,054
- Issue date May 31, 2011
- Shin-Etsu Chemical Co., Ltd.
- Noboru Kimura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heating apparatus which has electrostatic adsorption function, and...
- Patent number 6,953,918
- Issue date Oct 11, 2005
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heating apparatus with electrostatic attraction function
- Patent number 6,917,021
- Issue date Jul 12, 2005
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ceramic heating jig
- Patent number 6,384,383
- Issue date May 7, 2002
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple-layered ceramic heater
- Patent number 6,242,719
- Issue date Jun 5, 2001
- Shin-Etsu Handotai Co., Ltd.
- Shoji Kano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vessel of pyrolytic boron nitride
- Patent number 5,759,646
- Issue date Jun 2, 1998
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- C30 - CRYSTAL GROWTH
Information Patent Grant
Ceramic electrostatic chuck with built-in heater
- Patent number 5,665,260
- Issue date Sep 9, 1997
- Shin-Etsu Chemical Co., Ltd.
- Nobuo Kawada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HEAT-RESISTANT COAT MEMBER PACKAGED BODY, AND METHOD FOR PACKAGING...
- Publication number 20230304148
- Publication date Sep 28, 2023
- Shin-Etsu Chemical Co., Ltd.
- Shoji KANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANTALUM CARBIDE COATED CARBON MATERIAL, MANUFACTURING METHOD THERE...
- Publication number 20210140067
- Publication date May 13, 2021
- Shin-Etsu Chemical Co., Ltd.
- Chikara MORI
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
TANTALUM CARBIDE COATED CARBON MATERIAL, MANUFACTURING METHOD THERE...
- Publication number 20190169768
- Publication date Jun 6, 2019
- Shin-Etsu Chemical Co., Ltd.
- Chikara MORI
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
HEATING ELEMENT
- Publication number 20180124873
- Publication date May 3, 2018
- Shin-Etsu Chemical Co., Ltd.
- Shoji KANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC HEATER
- Publication number 20140263281
- Publication date Sep 18, 2014
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR COATING A GRAPHITE MATERIAL WITH PYROLYTIC BORON NITRIDE...
- Publication number 20130302616
- Publication date Nov 14, 2013
- Shoji KANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Corrosion-resistant article coated with aluminum nitride
- Publication number 20120107613
- Publication date May 3, 2012
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING AN ALUMINUM NITRIDE THIN FILM
- Publication number 20120100698
- Publication date Apr 26, 2012
- Shin-Etsu Chemical Co., Ltd.
- Koji Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Aluminum nitride film and a substance coated with same
- Publication number 20110256412
- Publication date Oct 20, 2011
- Shin-Etsu Chemical Co., Ltd.
- Koji Katoh
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Corrosion-resistant multilayer ceramic member
- Publication number 20100003510
- Publication date Jan 7, 2010
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC HEATER AND METHOD OF MANUFACTURING THE SAME
- Publication number 20090308859
- Publication date Dec 17, 2009
- Shin-Etsu Chemical Co., Ltd.
- Koji KATO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
WAFER HEATING APPARATUS HAVING ELECTROSTATIC ATTRACTION FUNCTION
- Publication number 20090242544
- Publication date Oct 1, 2009
- SHIN-ETSU CHEMICAL CO., LTD.
- Shoji Kano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Corrosion-resistant multilayer ceramic member
- Publication number 20090107635
- Publication date Apr 30, 2009
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrostatic chuck apparatus
- Publication number 20070274021
- Publication date Nov 29, 2007
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating element
- Publication number 20070241095
- Publication date Oct 18, 2007
- Shin-Etsu Chemical Co., Ltd.
- Noboru Kimura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heating element
- Publication number 20070241096
- Publication date Oct 18, 2007
- Shin-Etsu Chemical Co., Ltd.
- Noboru Kimura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Wafer heating apparatus having electrostatic adsorption function
- Publication number 20040223285
- Publication date Nov 11, 2004
- SHIN-ETSU CHEMICAL CO., LTD.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heating apparatus which has electrostatic adsorption function, and...
- Publication number 20040108314
- Publication date Jun 10, 2004
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heating apparatus with electrostatic attraction function
- Publication number 20030234248
- Publication date Dec 25, 2003
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Ceramic heating jig
- Publication number 20010003334
- Publication date Jun 14, 2001
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Tantalum carbide coated carbon material, manufacturing method there...

Ceramic heater

Corrosion-resistant multilayer ceramic member

Method for forming an aluminum nitride thin film

Heating element

Heating element

Heating apparatus which has electrostatic adsorption function, and...

Heating apparatus with electrostatic attraction function

Ceramic heating jig

Multiple-layered ceramic heater

Vessel of pyrolytic boron nitride

Ceramic electrostatic chuck with built-in heater

Patents Applicationslast 30 patents

HEAT-RESISTANT COAT MEMBER PACKAGED BODY, AND METHOD FOR PACKAGING...

TANTALUM CARBIDE COATED CARBON MATERIAL, MANUFACTURING METHOD THERE...

TANTALUM CARBIDE COATED CARBON MATERIAL, MANUFACTURING METHOD THERE...

HEATING ELEMENT

CERAMIC HEATER

METHOD FOR COATING A GRAPHITE MATERIAL WITH PYROLYTIC BORON NITRIDE...

Corrosion-resistant article coated with aluminum nitride

METHOD FOR FORMING AN ALUMINUM NITRIDE THIN FILM

Aluminum nitride film and a substance coated with same

Corrosion-resistant multilayer ceramic member

CERAMIC HEATER AND METHOD OF MANUFACTURING THE SAME

WAFER HEATING APPARATUS HAVING ELECTROSTATIC ATTRACTION FUNCTION

Corrosion-resistant multilayer ceramic member

Electrostatic chuck apparatus

Heating element

Heating element

Wafer heating apparatus having electrostatic adsorption function

Heating apparatus which has electrostatic adsorption function, and...

Heating apparatus with electrostatic attraction function

Ceramic heating jig