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Patents Grants
last 30 patents
Information
Patent Grant
Sub-resolution assist feature arranging method and computer program...
Patent number
8,809,072
Issue date
Aug 19, 2014
Kabushiki Kaisha Toshiba
Chikaaki Kodama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Simulation model creating method, computer program product, and met...
Patent number
8,381,138
Issue date
Feb 19, 2013
Kabushiki Kaisha Toshiba
Tetsuaki Matsunawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Simulation method and simulation program
Patent number
8,230,369
Issue date
Jul 24, 2012
Kabushiki Kaisha Toshiba
Akiko Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography process window analyzing method and analyzing program
Patent number
8,154,710
Issue date
Apr 10, 2012
Kabushiki Kaisha Toshiba
Shoji Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure method
Patent number
8,077,292
Issue date
Dec 13, 2011
Kabushiki Kaisha Toshiba
Yosuke Kitamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Simulation model creating method, mask data creating method and sem...
Patent number
8,055,366
Issue date
Nov 8, 2011
Kabushiki Kaisha Toshiba
Shoji Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of evaluating a photo mask and method of manufacturing a sem...
Patent number
7,912,275
Issue date
Mar 22, 2011
Kabushiki Kaisha Toshiba
Hiroki Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Creating method of simulation model, manufacturing method of photo...
Patent number
7,840,390
Issue date
Nov 23, 2010
Kabushiki Kaisha Toshiba
Masaki Satake
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask pattern preparation method, semiconductor device manufacturing...
Patent number
7,793,252
Issue date
Sep 7, 2010
Kabushiki Kaisha Toshiba
Toshiya Kotani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask data correction method, photomask manufacturing method, comput...
Patent number
7,685,556
Issue date
Mar 23, 2010
Kabushiki Kaisha Toshiba
Kazuya Fukuhara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask quality estimation system and method for use in manufactu...
Patent number
7,636,910
Issue date
Dec 22, 2009
Kabushiki Kaisha Toshiba
Yukiyasu Arisawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Light intensity distribution simulation method and computer program...
Patent number
7,596,776
Issue date
Sep 29, 2009
Kabushiki Kaisha Toshiba
Satoshi Tanaka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Exposure method, exposure quantity calculating system using the exp...
Patent number
7,575,835
Issue date
Aug 18, 2009
Kabushiki Kaisha Toshiba
Takashi Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask pattern data producing method, patterning method, reticle corr...
Patent number
7,560,197
Issue date
Jul 14, 2009
Kabushiki Kaisha Toshiba
Hiroko Nakamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure mask acceptance decision system, projection exp...
Patent number
7,446,852
Issue date
Nov 4, 2008
Kabushiki Kaisha Toshiba
Yukiyasu Arisawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography simulation method and recording medium
Patent number
7,426,712
Issue date
Sep 16, 2008
Kabushiki Kaisha Toshiba
Toshiya Kotani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Simulator of lithography tool for correcting focus error and critic...
Patent number
7,336,341
Issue date
Feb 26, 2008
Kabushiki Kaisha Toshiba
Shoji Mimotogi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for a predicting a pattern shape by using an actual measured...
Patent number
7,319,944
Issue date
Jan 15, 2008
Kabushiki Kaisha Toshiba
Hiroko Nakamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method for correcting a focal point, and a method for manu...
Patent number
7,248,349
Issue date
Jul 24, 2007
Kabushiki Kaisha Toshiba
Takashi Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for evaluating photo mask and method for manufacturing semic...
Patent number
7,229,721
Issue date
Jun 12, 2007
Kabushiki Kaisha Toshiba
Shoji Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming contact hole and method of manufacturing semicond...
Patent number
7,148,138
Issue date
Dec 12, 2006
Kabushiki Kaisha Toshiba
Shoji Mimotogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure method, exposure quantity calculating system using the exp...
Patent number
7,118,834
Issue date
Oct 10, 2006
Kabushiki Kaisha Toshiba
Takashi Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing a photo mask and method of manufacturing a...
Patent number
7,090,949
Issue date
Aug 15, 2006
Kabushiki Kaisha Toshiba
Shigeki Nojima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for evaluating lithography process margins
Patent number
6,988,016
Issue date
Jan 17, 2006
Kabushiki Kaisha Toshiba
Shoji Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for inspecting exposure apparatus, exposure method for corre...
Patent number
6,967,719
Issue date
Nov 22, 2005
Kabushiki Kaisha Toshiba
Takashi Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing photomask
Patent number
6,649,310
Issue date
Nov 18, 2003
Kabushiki Kaisha Toshiba
Masamitsu Itoh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist pattern forming method
Patent number
6,632,592
Issue date
Oct 14, 2003
Kabushiki Kaisha Toshiba
Shoji Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Circuit designing method for semiconductor device and computer-read...
Patent number
6,418,553
Issue date
Jul 9, 2002
Kabushiki Kaisha Toshiba
Akiko Yamada
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Computer program product for calculating a process tolerance relati...
Patent number
6,294,297
Issue date
Sep 25, 2001
Kabushiki Kaisha Toshiba
Shoji Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method and exposure apparatus using it
Patent number
6,252,651
Issue date
Jun 26, 2001
Kabushiki Kaisha Toshiba
Tadahito Fujisawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
DATA GENERATION APPARATUS, DATA GENERATION METHOD, AND COMPUTER-REA...
Publication number
20240105420
Publication date
Mar 28, 2024
KIOXIA Corporation
Katsuyoshi KODERA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ORIGINAL PLATE AND METHOD OF MANUFACTURING THE SAME
Publication number
20220082933
Publication date
Mar 17, 2022
KIOXIA Corporation
Kaori UMEZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN FORMING METHOD, PHOTOMASK SUBSTRATE CREATION METHOD, PHOTOM...
Publication number
20210341830
Publication date
Nov 4, 2021
KIOXIA Corporation
Yukio OPPATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN DATA GENERATION METHOD, PATTERN DATA GENERATION DEVICE, AND...
Publication number
20150261904
Publication date
Sep 17, 2015
Kabushiki Kaisha Toshiba
Sachiko KOBAYASHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SIMULATION MODEL CREATING METHOD, COMPUTER PROGRAM PRODUCT, AND MET...
Publication number
20120324407
Publication date
Dec 20, 2012
Tetsuaki MATSUNAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUB-RESOLUTION ASSIST FEATURE ARRANGING METHOD AND COMPUTER PROGRAM...
Publication number
20110294239
Publication date
Dec 1, 2011
Chikaaki KODAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EVALUATING APPARATUS, EVALUATING METHOD, AND COMPUTER PROGRAM PRODUCT
Publication number
20110224934
Publication date
Sep 15, 2011
Seiro Miyoshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN-CORRECTION SUPPORTING METHOD, METHOD OF MANUFACTURING SEMIC...
Publication number
20100167190
Publication date
Jul 1, 2010
Kazuhiro TAKAHATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photomask quality estimation system and method for use in manufactu...
Publication number
20100112812
Publication date
May 6, 2010
Kabushiki Kaisha Toshiba
Yukiyasu Arisawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE METHOD
Publication number
20090244504
Publication date
Oct 1, 2009
Yosuke Kitamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY PROCESS WINDOW ANALYZING METHOD AND ANALYZING PROGRAM
Publication number
20090244512
Publication date
Oct 1, 2009
Shoji Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SIMULATION MODEL CREATING METHOD, MASK DATA CREATING METHOD AND SEM...
Publication number
20090240362
Publication date
Sep 24, 2009
Shoji Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SIMULATION METHOD AND SIMULATION PROGRAM
Publication number
20090217233
Publication date
Aug 27, 2009
Akiko Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF EVALUATING A PHOTO MASK AND METHOD OF MANUFACTURING A SEM...
Publication number
20090202924
Publication date
Aug 13, 2009
Hiroki YAMAMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithography simulation method, mask pattern preparation method, sem...
Publication number
20090019418
Publication date
Jan 15, 2009
Kabushiki Kaisha Toshiba
Toshiya Kotani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Creating method of simulation model, manufacturing method of photo...
Publication number
20080004852
Publication date
Jan 3, 2008
Masaki Satake
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Light intensity distribution simulation method and computer program...
Publication number
20070234269
Publication date
Oct 4, 2007
Satoshi Tanaka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Projection exposure mask acceptance decision system, projection exp...
Publication number
20070182941
Publication date
Aug 9, 2007
Yukiyasu Arisawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithography simulation method, mask pattern preparation method, sem...
Publication number
20070019058
Publication date
Jan 25, 2007
Toshiya Kotani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photomask quality estimation system and method for use in manufactu...
Publication number
20070005280
Publication date
Jan 4, 2007
Yukiyasu Arisawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure method, exposure quantity calculating system using the exp...
Publication number
20060292460
Publication date
Dec 28, 2006
Kabushiki Kaisha Toshiba
Takashi Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure analyzing system, method for analyzing exposure condition,...
Publication number
20060172207
Publication date
Aug 3, 2006
Megumi Asaba
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pattern designing method, photomask manufacturing method, resist pa...
Publication number
20060073425
Publication date
Apr 6, 2006
Kabushiki Kaisha Toshiba
Maki Miyazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure method for correcting a focal point, and a method for manu...
Publication number
20060061756
Publication date
Mar 23, 2006
Kabushiki Kaisha Toshiba
Takashi Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure system and method for manufacturing semiconductor device
Publication number
20060001846
Publication date
Jan 5, 2006
Takuya Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask pattern data producing method, patterning method, reticle corr...
Publication number
20050196684
Publication date
Sep 8, 2005
Hiroko Nakamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask data correction method, photomask manufacturing method, comput...
Publication number
20050188341
Publication date
Aug 25, 2005
Kazuya Fukuhara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Simulator of lithography tool, simulation method, and computer prog...
Publication number
20050183056
Publication date
Aug 18, 2005
Shoji Mimotogi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Critical pattern extracting method, critical pattern extracting pro...
Publication number
20050166172
Publication date
Jul 28, 2005
Daisuke Kawamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of forming contact hole and method of manufacturing semicond...
Publication number
20050153540
Publication date
Jul 14, 2005
Shoji Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY