Shoji Yoshikawa

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Lunar orbiting satellite system, and ground station of lunar orbiti...
- Patent number 11,260,996
- Issue date Mar 1, 2022
- Mitsubishi Electric Corporation
- Naoki Imamura
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Grant
Electron-beam irradiated area adjustment method and adjustment syst...
- Patent number 10,446,404
- Issue date Oct 15, 2019
- Ebara Corporation
- Ryo Tajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 10,157,722
- Issue date Dec 18, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system and inspection image data generation method
- Patent number 10,074,510
- Issue date Sep 11, 2018
- Ebara Corporation
- Kenichi Suematsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface processing apparatus
- Patent number 9,852,878
- Issue date Dec 26, 2017
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 9,601,302
- Issue date Mar 21, 2017
- Ebara Corporation
- Shoji Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 9,406,480
- Issue date Aug 2, 2016
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 9,368,314
- Issue date Jun 14, 2016
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus
- Patent number 9,134,261
- Issue date Sep 15, 2015
- Ebara Corporation
- Shoji Yoshikawa
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system, inspection image data generation method, inspect...
- Patent number 9,105,445
- Issue date Aug 11, 2015
- Ebara Corporation
- Ryo Tajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 8,946,629
- Issue date Feb 3, 2015
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,946,631
- Issue date Feb 3, 2015
- Ebara Corporation
- Nobuharu Noji
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Sample observing device and sample observing method
- Patent number 8,884,225
- Issue date Nov 11, 2014
- Ebara Corporation
- Tsutomu Karimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 8,822,919
- Issue date Sep 2, 2014
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,803,103
- Issue date Aug 12, 2014
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector and inspecting apparatus
- Patent number 8,796,621
- Issue date Aug 5, 2014
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,742,341
- Issue date Jun 3, 2014
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus
- Patent number 8,742,344
- Issue date Jun 3, 2014
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Inspection device
- Patent number 8,497,476
- Issue date Jul 30, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Detector and inspecting apparatus
- Patent number 8,431,892
- Issue date Apr 30, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,368,031
- Issue date Feb 5, 2013
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,053,726
- Issue date Nov 8, 2011
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 7,928,378
- Issue date Apr 19, 2011
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Detector and inspecting apparatus
- Patent number 7,928,382
- Issue date Apr 19, 2011
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,888,642
- Issue date Feb 15, 2011
- Ebara Corporation
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sheet beam-type testing apparatus
- Patent number 7,829,871
- Issue date Nov 9, 2010
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,745,784
- Issue date Jun 29, 2010
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 7,741,601
- Issue date Jun 22, 2010
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 7,601,972
- Issue date Oct 13, 2009
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Method for marking defect and device therefor
- Patent number 7,599,052
- Issue date Oct 6, 2009
- NKK Corporation
- Mitsuaki Uesugi
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...

Patents Applicationslast 30 patents

Information Patent Application
IMAGE PROCESSING DEVICE AND IMAGE PROCESSING METHOD
- Publication number 20240312203
- Publication date Sep 19, 2024
- Mitsubishi Electric Corporation
- Shoji YOSHIKAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LUNAR ORBITING SATELLITE SYSTEM, AND GROUND STATION OF LUNAR ORBITI...
- Publication number 20210078733
- Publication date Mar 18, 2021
- Mitsubishi Electric Corporation
- Naoki IMAMURA
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON-BEAM IRRADIATED AREA ADJUSTMENT METHOD AND ADJUSTMENT SYST...
- Publication number 20180233374
- Publication date Aug 16, 2018
- EBARA CORPORATION
- Ryo TAJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20160307726
- Publication date Oct 20, 2016
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
SURFACE PROCESSING APPARATUS
- Publication number 20150371813
- Publication date Dec 24, 2015
- EBARA CORPORATION
- Masahiro HATAKEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS
- Publication number 20150340193
- Publication date Nov 26, 2015
- EBARA CORPORATION
- Shoji YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20150122993
- Publication date May 7, 2015
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20150097116
- Publication date Apr 9, 2015
- EBARA CORPORATION
- Masahiro HATAKEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION SYSTEM AND INSPECTION IMAGE DATA GENERATION METHOD
- Publication number 20150041646
- Publication date Feb 12, 2015
- EBARA CORPORATION
- Kenichi Suematsu
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD
- Publication number 20140367570
- Publication date Dec 18, 2014
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20140319345
- Publication date Oct 30, 2014
- EBARA CORPORATION
- Masahiro HATAKEYAMA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140319346
- Publication date Oct 30, 2014
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20140312227
- Publication date Oct 23, 2014
- EBARA CORPORATION
- Shoji YOSHIKAWA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM, INSPECTION IMAGE DATA GENERATION METHOD, INSPECT...
- Publication number 20140291515
- Publication date Oct 2, 2014
- Ryo TAJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20140158885
- Publication date Jun 12, 2014
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20140077078
- Publication date Mar 20, 2014
- Masahiro HATAKEYAMA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140034831
- Publication date Feb 6, 2014
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE
- Publication number 20140014848
- Publication date Jan 16, 2014
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
DETECTOR AND INSPECTING APPARATUS
- Publication number 20130228684
- Publication date Sep 5, 2013
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE OBSERVING DEVICE AND SAMPLE OBSERVING METHOD
- Publication number 20130161511
- Publication date Jun 27, 2013
- EBARA CORPORATION
- Tsutomu Karimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20120235036
- Publication date Sep 20, 2012
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20120032079
- Publication date Feb 9, 2012
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING S...
- Publication number 20110104830
- Publication date May 5, 2011
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
DETECTOR AND INSPECTING APPARATUS
- Publication number 20110024623
- Publication date Feb 3, 2011
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Testing apparatus using charged particles and device manufacturing...
- Publication number 20100237243
- Publication date Sep 23, 2010
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
DETECTOR AND INSPECTING APPARATUS
- Publication number 20090224151
- Publication date Sep 10, 2009
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Testing apparatus using charged particles and device manufacturing...
- Publication number 20090101816
- Publication date Apr 23, 2009
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
Method for marking defect and device therefor
- Publication number 20090086209
- Publication date Apr 2, 2009
- NKK Corporation
- Mitsuaki Uesugi
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20090050822
- Publication date Feb 26, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20090039262
- Publication date Feb 12, 2009
- EBARA CORPORATION
- Mamoru NAKASUJI
- G01 - MEASURING TESTING

Shoji Yoshikawa

Person

Patents Grantslast 30 patents

Lunar orbiting satellite system, and ground station of lunar orbiti...

Electron-beam irradiated area adjustment method and adjustment syst...

Inspection device

Inspection system and inspection image data generation method

Surface processing apparatus

Inspection apparatus

Testing apparatus using charged particles and device manufacturing...

Inspection system by charged particle beam and method of manufactur...

Inspection apparatus

Inspection system, inspection image data generation method, inspect...

Inspection apparatus

Testing apparatus using charged particles and device manufacturing...

Sample observing device and sample observing method

Apparatus for inspection with electron beam, method for operating s...

Inspection system by charged particle beam and method of manufactur...

Detector and inspecting apparatus

Testing apparatus using charged particles and device manufacturing...

Inspection apparatus

Inspection device

Detector and inspecting apparatus

Inspection system by charged particle beam and method of manufactur...

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Detector and inspecting apparatus

Electron beam apparatus and method of manufacturing semiconductor d...

Sheet beam-type testing apparatus

Electron beam apparatus and method of manufacturing semiconductor d...

Testing apparatus using charged particles and device manufacturing...

Inspection system by charged particle beam and method of manufactur...

Method for marking defect and device therefor

Patents Applicationslast 30 patents

IMAGE PROCESSING DEVICE AND IMAGE PROCESSING METHOD

LUNAR ORBITING SATELLITE SYSTEM, AND GROUND STATION OF LUNAR ORBITI...

ELECTRON-BEAM IRRADIATED AREA ADJUSTMENT METHOD AND ADJUSTMENT SYST...

INSPECTION DEVICE

SURFACE PROCESSING APPARATUS

INSPECTION APPARATUS

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

INSPECTION APPARATUS

INSPECTION SYSTEM AND INSPECTION IMAGE DATA GENERATION METHOD

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

INSPECTION APPARATUS

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

INSPECTION APPARATUS

INSPECTION SYSTEM, INSPECTION IMAGE DATA GENERATION METHOD, INSPECT...

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

INSPECTION APPARATUS

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

INSPECTION DEVICE

DETECTOR AND INSPECTING APPARATUS

SAMPLE OBSERVING DEVICE AND SAMPLE OBSERVING METHOD

INSPECTION DEVICE

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING S...

DETECTOR AND INSPECTING APPARATUS

Testing apparatus using charged particles and device manufacturing...

DETECTOR AND INSPECTING APPARATUS

Testing apparatus using charged particles and device manufacturing...

Method for marking defect and device therefor

Electron beam apparatus and method of manufacturing semiconductor d...

ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...