Shori Mokuo

Person

Tosu-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,216,391
- Issue date Jul 10, 2012
- Tokyo Electron Limited
- Shori Mokuo
- B08 - CLEANING
Information Patent Grant
Substrate processing method and apparatus
- Patent number 6,954,585
- Issue date Oct 11, 2005
- Tokyo Electron Limited
- Shori Mokuo
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Method and apparatus for detecting liquid level
- Patent number 6,715,348
- Issue date Apr 6, 2004
- Tokyo Electron Limited
- Shori Mokuo
- G01 - MEASURING TESTING
Information Patent Grant
Heating device, liquid processing apparatus using the heating devic...
- Patent number 6,573,482
- Issue date Jun 3, 2003
- Tokyo Electron Limited
- Shori Mokuo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate transferring device
- Patent number 6,022,185
- Issue date Feb 8, 2000
- Tokyo Electron Limited
- Shori Mokuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrasonic cleaning device
- Patent number 5,911,232
- Issue date Jun 15, 1999
- Tokyo Electron, Ltd.
- Shori Mokuo
- B08 - CLEANING
Information Patent Grant
Substrate washing and drying apparatus, substrate washing method, a...
- Patent number 5,845,660
- Issue date Dec 8, 1998
- Tokyo Electron Limited
- Naoki Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying apparatus and substrate drying method
- Patent number 5,671,544
- Issue date Sep 30, 1997
- Tokyo Electron Limited
- Kenji Yokomizo
- F26 - DRYING
Information Patent Grant
Communication system used in semiconductor device manufacturing equ...
- Patent number 5,666,381
- Issue date Sep 9, 1997
- Tokyo Electron Limited
- Shori Mokuo
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Substrate drying apparatus and substrate drying method
- Patent number 5,575,079
- Issue date Nov 19, 1996
- Tokyo Electron Limited
- Kenji Yokomizo
- F26 - DRYING
Information Patent Grant
Apparatus and method using optical sensors recessed in channel wall...
- Patent number 5,406,092
- Issue date Apr 11, 1995
- Tokyo Electron Limited
- Shori Mokuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate detector with light emitting and receiving elements arran...
- Patent number 5,319,216
- Issue date Jun 7, 1994
- Tokyo Electron Limited
- Shori Mokuo
- G01 - MEASURING TESTING
Information Patent Grant
Substrate detector with light emitting and receiving elements arran...
- Patent number 5,266,812
- Issue date Nov 30, 1993
- Tokyo Electron Limited
- Shori Mokuo
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Processing liquid tank and processing system
- Publication number 20040154651
- Publication date Aug 12, 2004
- Shori Mokuo
- B08 - CLEANING
Information Patent Application
Liquid processing apparatus and liquid processing method
- Publication number 20030164179
- Publication date Sep 4, 2003
- TOKYO ELECTRON LIMITED
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for detecting liquid level
- Publication number 20020124646
- Publication date Sep 12, 2002
- TOKYO ELECTRON LIMITED
- Shori Mokuo
- G01 - MEASURING TESTING
Information Patent Application
Heating device, liquid processing apparatus using the heating devic...
- Publication number 20020063121
- Publication date May 30, 2002
- Shori Mokuo
- G05 - CONTROLLING REGULATING

Shori Mokuo

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing method and apparatus

Method and apparatus for detecting liquid level

Heating device, liquid processing apparatus using the heating devic...

Substrate transferring device

Ultrasonic cleaning device

Substrate washing and drying apparatus, substrate washing method, a...

Substrate drying apparatus and substrate drying method

Communication system used in semiconductor device manufacturing equ...

Substrate drying apparatus and substrate drying method

Apparatus and method using optical sensors recessed in channel wall...

Substrate detector with light emitting and receiving elements arran...

Substrate detector with light emitting and receiving elements arran...

Patents Applicationslast 30 patents

Processing liquid tank and processing system

Liquid processing apparatus and liquid processing method

Method and apparatus for detecting liquid level

Heating device, liquid processing apparatus using the heating devic...