Shota CHIDA

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Patents Grantslast 30 patents

Information Patent Grant
Method for depositing boron nitride film and film deposition apparatus
- Patent number 12,049,694
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Shota Chida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
- Publication number 20240014031
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Shota CHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD
- Publication number 20230420249
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Shota CHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON FILM DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20220246429
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Yosuke WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING BORON NITRIDE FILM AND FILM DEPOSITION APPARATUS
- Publication number 20220235457
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Shota CHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...