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Shota Ezaki

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  • Kurokawa-gun, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE SUPPORT
    • Publication number 20250022724
    • Publication date Jan 16, 2025
    • TOKYO ELECTRON LIMITED
    • Masanori TAKAHASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20240404799
    • Publication date Dec 5, 2024
    • TOKYO ELECTRON LIMITED
    • Shota EZAKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    STAGE AND PLASMA PROCESSING APPARATUS
    • Publication number 20230317474
    • Publication date Oct 5, 2023
    • TOKYO ELECTRON LIMITED
    • Shota EZAKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20220415628
    • Publication date Dec 29, 2022
    • TOKYO ELECTRON LIMITED
    • Shota EZAKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE SUPPORT
    • Publication number 20210313202
    • Publication date Oct 7, 2021
    • TOKYO ELECTRON LIMITED
    • Masanori TAKAHASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    STAGE AND PLASMA PROCESSING APPARATUS
    • Publication number 20210057237
    • Publication date Feb 25, 2021
    • TOKYO ELECTRON LIMITED
    • Shota EZAKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210043476
    • Publication date Feb 11, 2021
    • TOKYO ELECTRON LIMITED
    • Katsuyuki Koizumi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210043433
    • Publication date Feb 11, 2021
    • TOKYO ELECTRON LIMITED
    • Katsuyuki Koizumi
    • F28 - HEAT EXCHANGE IN GENERAL