Shota IWAHATA

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,260,436
- Issue date Mar 1, 2022
- SCREEN Holdings Co., Ltd.
- Naoyuki Osada
- B08 - CLEANING
Information Patent Grant
Processing liquid supplying apparatus, substrate processing apparat...
- Patent number 11,094,564
- Issue date Aug 17, 2021
- SCREEN Holdings Co., Ltd.
- Shota Iwahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 10,886,133
- Issue date Jan 5, 2021
- SCREEN Holdings Co., Ltd.
- Daisuke Shimizu
- B08 - CLEANING
Information Patent Grant
Chemical solution feeder, substrate treatment apparatus, method for...
- Patent number 10,816,141
- Issue date Oct 27, 2020
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,717,117
- Issue date Jul 21, 2020
- SCREEN Holdings Co., Ltd.
- Naoyuki Osada
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,651,029
- Issue date May 12, 2020
- SCREEN Holdings Co., Ltd.
- Hiroaki Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,615,026
- Issue date Apr 7, 2020
- SCREEN Holdings Co., Ltd.
- Shota Iwahata
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200290101
- Publication date Sep 17, 2020
- SCREEN Holdings Co., Ltd.
- Naoyuki OSADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20190267244
- Publication date Aug 29, 2019
- SCREEN Holdings Co., Ltd.
- Daisuke SHIMIZU
- B24 - GRINDING POLISHING
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS, SUBSTRATE PROCESSING APPARAT...
- Publication number 20190131144
- Publication date May 2, 2019
- SCREEN Holdings Co., Ltd.
- Shota IWAHATA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CHEMICAL SOLUTION FEEDER, SUBSTRATE TREATMENT APPARATUS, METHOD FOR...
- Publication number 20190056066
- Publication date Feb 21, 2019
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180261449
- Publication date Sep 13, 2018
- SCREEN Holdings Co., Ltd.
- Shota IWAHATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180236510
- Publication date Aug 23, 2018
- SCREEN Holdings Co., Ltd.
- Naoyuki OSADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170186599
- Publication date Jun 29, 2017
- SCREEN Holdings Co., Ltd.
- Hiroaki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160365238
- Publication date Dec 15, 2016
- SCREEN Holdings Co., Ltd.
- Shota IWAHATA
- H01 - BASIC ELECTRIC ELEMENTS

Shota IWAHATA

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Processing liquid supplying apparatus, substrate processing apparat...

Substrate processing method and substrate processing device

Chemical solution feeder, substrate treatment apparatus, method for...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

PROCESSING LIQUID SUPPLYING APPARATUS, SUBSTRATE PROCESSING APPARAT...

CHEMICAL SOLUTION FEEDER, SUBSTRATE TREATMENT APPARATUS, METHOD FOR...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS