Shota KANEKO

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Forming method of component and substrate processing system
- Patent number 11,981,993
- Issue date May 14, 2024
- Tokyo Electron Limited
- Michishige Saito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Forming method of component and plasma processing apparatus
- Patent number 11,967,487
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Michishige Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placing table and substrate processing apparatus
- Patent number 11,764,040
- Issue date Sep 19, 2023
- Tokyo Electron Limited
- Michishige Saito
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Substrate processing apparatus
- Patent number 11,532,461
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Michishige Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,665,416
- Issue date May 26, 2020
- Tokyo Electron Limited
- Shinji Kubota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RESTORING METHOD OF CONSUMED COMPONENT
- Publication number 20240254620
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Michishige Saito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FORMING METHOD OF COMPONENT AND PLASMA PROCESSING APPARATUS
- Publication number 20240234099
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Michishige Saito
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
FORMING METHOD OF COMPONENT AND PLASMA PROCESSING APPARATUS
- Publication number 20210366691
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Michishige Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING METHOD OF COMPONENT AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20210366697
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Michishige Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONITORING SYSTEM
- Publication number 20210143033
- Publication date May 13, 2021
- TOKYO ELECTRON LIMITED
- Shota KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER, MANUFACTURING METHOD OF MEMBER AND SUBSTRATE PROCESSING APP...
- Publication number 20210111005
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Takayuki Ishii
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200251315
- Publication date Aug 6, 2020
- TOKYO ELECTRON LIMITED
- Michishige Saito
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200126816
- Publication date Apr 23, 2020
- TOKYO ELECTRON LIMITED
- Michishige Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200027688
- Publication date Jan 23, 2020
- TOKYO ELECTRON LIMITED
- Shinji KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS

Shota KANEKO

Person

Patents Grantslast 30 patents

Forming method of component and substrate processing system

Forming method of component and plasma processing apparatus

Placing table and substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Patents Applicationslast 30 patents

RESTORING METHOD OF CONSUMED COMPONENT

FORMING METHOD OF COMPONENT AND PLASMA PROCESSING APPARATUS

FORMING METHOD OF COMPONENT AND PLASMA PROCESSING APPARATUS

FORMING METHOD OF COMPONENT AND SUBSTRATE PROCESSING SYSTEM

MONITORING SYSTEM

MEMBER, MANUFACTURING METHOD OF MEMBER AND SUBSTRATE PROCESSING APP...

PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS