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Shota Nunomura
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Higashi-ku, JP
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last 30 patents
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Patent Application
Formation technology for nanoparticle films having low dielectric c...
Publication number
20060269690
Publication date
Nov 30, 2006
ASM JAPAN K.K.
Yukio Watanabe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Formation technology of nano-particle films having low dielectric c...
Publication number
20060105583
Publication date
May 18, 2006
ASM JAPAN K.K.
Shingo Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...