Shota UEYAMA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid amount measuring method and computer-readable recording medium
- Patent number 12,174,549
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- B08 - CLEANING
Information Patent Grant
Substrate processing system, liquid amount measuring method, comput...
- Patent number 11,726,409
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20240012329
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Junghyun KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20240009697
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Junghyun KIM
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID AMOUNT MEASURING METHOD AND COMPUTER-READABLE RECORDING MEDIUM
- Publication number 20230418166
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, LIQUID AMOUNT MEASURING METHOD, AND CO...
- Publication number 20220171294
- Publication date Jun 2, 2022
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- B08 - CLEANING