Shota UMEDA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Diagnosis apparatus, plasma processing apparatus and diagnosis method
- Patent number 12,040,167
- Issue date Jul 16, 2024
- HITACHI HIGH-TECH CORPORATION
- Shota Umeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma processing apparatus and plasma processing system
- Patent number 12,014,909
- Issue date Jun 18, 2024
- HITACHI HIGH-TECH CORPORATION
- Ryoji Asakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,289,313
- Issue date Mar 29, 2022
- HITACHI HIGH-TECH CORPORATION
- Shota Umeda
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing apparatus and plasma processing system
- Patent number 10,872,750
- Issue date Dec 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Ryoji Asakura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DIAGNOSTIC DEVICE, DIAGNOSTIC METHOD, SEMICONDUCTOR MANUFACTURING E...
- Publication number 20240395518
- Publication date Nov 28, 2024
- Hitachi High-Tech Corporation
- Shota UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIAGNOSIS DEVICE, DIAGNOSIS METHOD, PLASMA PROCESSING APPARATUS, AN...
- Publication number 20240213003
- Publication date Jun 27, 2024
- Hitachi High-Tech Corporation
- Shota UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS DIAGNOSTIC APPARATUS, APPARATUS DIAGNOSTIC METHOD, PLASMA...
- Publication number 20220399182
- Publication date Dec 15, 2022
- Hitachi High-Tech Corporation
- Shota Umeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIAGNOSIS APPARATUS, PLASMA PROCESSING APPARATUS AND DIAGNOSIS METHOD
- Publication number 20220157580
- Publication date May 19, 2022
- Hitachi High-Tech Corporation
- Shota Umeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PRODUCTION INFORMATION MANAGEMENT SYSTEM AND PRODUCTION INFORMATION...
- Publication number 20220137609
- Publication date May 5, 2022
- Hitachi, Ltd
- Daisuke TSUTSUMI
- G05 - CONTROLLING REGULATING
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING SYSTEM
- Publication number 20210074528
- Publication date Mar 11, 2021
- HITACHI HIGH-TECH CORPORATION
- Ryoji Asakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190221407
- Publication date Jul 18, 2019
- Hitachi High-Technologies Corporation
- Shota UMEDA
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING SYSTEM
- Publication number 20190051502
- Publication date Feb 14, 2019
- Hitachi High-Technologies Corporation
- Ryoji ASAKURA
- H01 - BASIC ELECTRIC ELEMENTS

Shota UMEDA

Person

Patents Grantslast 30 patents

Diagnosis apparatus, plasma processing apparatus and diagnosis method

Plasma processing apparatus and plasma processing system

Plasma processing apparatus

Plasma processing apparatus and plasma processing system

Patents Applicationslast 30 patents

DIAGNOSTIC DEVICE, DIAGNOSTIC METHOD, SEMICONDUCTOR MANUFACTURING E...

DIAGNOSIS DEVICE, DIAGNOSIS METHOD, PLASMA PROCESSING APPARATUS, AN...

APPARATUS DIAGNOSTIC APPARATUS, APPARATUS DIAGNOSTIC METHOD, PLASMA...

DIAGNOSIS APPARATUS, PLASMA PROCESSING APPARATUS AND DIAGNOSIS METHOD

PRODUCTION INFORMATION MANAGEMENT SYSTEM AND PRODUCTION INFORMATION...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING SYSTEM

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING SYSTEM