Shota Umezaki

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,057,326
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,742,232
- Issue date Aug 29, 2023
- Tokyo Electron Limited
- Yoshinori Ikeda
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,688,613
- Issue date Jun 27, 2023
- Tokyo Electron Limited
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing system and sub...
- Patent number 11,373,883
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Shota Umezaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,217,451
- Issue date Jan 4, 2022
- Tokyo Electron Limited
- Hitoshi Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus having top plate with through hole a...
- Patent number 10,892,176
- Issue date Jan 12, 2021
- Tokyo Electron Limited
- Yoshinori Ikeda
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240339339
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240242977
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...
- Publication number 20240242978
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...
- Publication number 20240240859
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE
- Publication number 20240234172
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Takahiro HAYASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240194496
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE
- Publication number 20240136206
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Takahiro HAYASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230352328
- Publication date Nov 2, 2023
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220319876
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220208567
- Publication date Jun 30, 2022
- TOKYO ELECTRON LIMITED
- Mikio Nakashima
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220059357
- Publication date Feb 24, 2022
- TOKYO ELECTRON LIMITED
- Hitoshi KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220044945
- Publication date Feb 10, 2022
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220044944
- Publication date Feb 10, 2022
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210313209
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200234998
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Hitoshi KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND SUB...
- Publication number 20200006092
- Publication date Jan 2, 2020
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190355593
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Yoshinori Ikeda
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20190341272
- Publication date Nov 7, 2019
- TOKYO ELECTRON LIMITED
- Yoshinori Ikeda
- H01 - BASIC ELECTRIC ELEMENTS

Shota Umezaki

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, substrate processing system and sub...

Substrate processing method and substrate processing apparatus

Substrate processing apparatus having top plate with through hole a...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...

SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND SUB...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...