Shou-Qian Shao

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Winchester, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Sheet type heat treating apparatus and method for processing semico...
- Patent number 7,029,505
- Issue date Apr 18, 2006
- Tokyo Electron Limited
- Lin Sha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ULTRAVIOLET-RAY-ASSISTED PROCESSING APPARATUS FOR SEMICONDUCTOR PRO...
- Publication number 20080127895
- Publication date Jun 5, 2008
- Shou-Qian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXYGEN CONDITIONING OF PLASMA VESSELS
- Publication number 20080083609
- Publication date Apr 10, 2008
- MKS Instruments, Inc.
- Shou-Qian Shao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Oxygen conditioning of plasma vessels
- Publication number 20080083701
- Publication date Apr 10, 2008
- MKS Instruments, Inc.
- Shou-Qian Shao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sheet type heat treating device and method for processing semicondu...
- Publication number 20050260835
- Publication date Nov 24, 2005
- Lin Sha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ultraviolet ray assisted processing device for semiconductor proces...
- Publication number 20040149215
- Publication date Aug 5, 2004
- Shou-Qian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...