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Shou-sung Chang
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Conditioner assembly and a conditioner back support for a chemical...
Patent number
6,322,429
Issue date
Nov 27, 2001
Mosel Vitelic, Inc.
Ethan C. Wilson
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad shaping and patterning
Patent number
6,315,857
Issue date
Nov 13, 2001
Mosel Vitelic, Inc.
Tsungnan Cheng
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing head for a chemical mechanical polishing apparatus
Patent number
6,159,083
Issue date
Dec 12, 2000
Aplex, Inc.
Gregory A. Appel
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer carrier head with inflatable bladder and attack angle control...
Patent number
6,080,040
Issue date
Jun 27, 2000
Aplex Group
Gregory A. Appel
B24 - GRINDING POLISHING
Information
Patent Grant
Conditioner assembly for a chemical mechanical polishing apparatus
Patent number
6,042,457
Issue date
Mar 28, 2000
Aplex, Inc.
Ethan C. Wilson
B24 - GRINDING POLISHING
Information
Patent Grant
Temperature regulation in a CMP process
Patent number
6,000,997
Issue date
Dec 14, 1999
Aplex, Inc.
Shu-Hsin Kao
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing tool having a sealed fluid chamber for support of polishi...
Patent number
5,980,368
Issue date
Nov 9, 1999
Aplex Group
Shou-sung Chang
B24 - GRINDING POLISHING