Shou-Wen Kuo

Person

Hsinchu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for multi-spray RRC process with dynamic control
- Patent number 12,216,407
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Hsuan Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum wafer chuck for manufacturing semiconductor devices
- Patent number 12,191,185
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Fa Lee
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
System and method for ring frame cleaning and inspection
- Patent number 12,165,901
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for raised floor automated sensor vehicles
- Patent number 12,153,433
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Kang Hu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Gas tube, gas supply system and manufacturing method of semiconduct...
- Patent number 12,037,687
- Issue date Jul 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Shiung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EFEM robot auto teaching methodology
- Patent number 11,984,331
- Issue date May 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated inspection tool
- Patent number 11,961,770
- Issue date Apr 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Han Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for inspecting wafer carriers
- Patent number 11,929,271
- Issue date Mar 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Kang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect offset correction
- Patent number 11,842,481
- Issue date Dec 12, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Ko Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for ring frame cleaning and inspection
- Patent number 11,764,097
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor equipment management method, electronic device, and n...
- Patent number 11,754,989
- Issue date Sep 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sing-Tsung Li
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automated transfer and drying tool for process chamber
- Patent number 11,699,619
- Issue date Jul 11, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for map-free inspection of semiconductor devices
- Patent number 11,651,981
- Issue date May 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jiao-Rou Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for multi-spray RRC process with dynamic control
- Patent number 11,592,748
- Issue date Feb 28, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Hsuan Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated chip die carrier exchanger
- Patent number 11,545,382
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien-Fa Lee
- B08 - CLEANING
Information Patent Grant
Vacuum wafer chuck for manufacturing semiconductor devices
- Patent number 11,508,608
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Fa Lee
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Defect offset correction
- Patent number 11,430,108
- Issue date Aug 30, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Ko Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Gas tube, gas supply system and manufacturing method of semiconduct...
- Patent number 11,414,757
- Issue date Aug 16, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Shiung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for raised floor automated sensor vehicles
- Patent number 11,334,080
- Issue date May 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Kang Hu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Automated inspection tool
- Patent number 11,171,065
- Issue date Nov 9, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Han Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor processing stage profiler jig
- Patent number 11,152,238
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Kang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Topological scanning method and system
- Patent number 11,120,539
- Issue date Sep 14, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-Hsiang Chuang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods for selectively forming identification mark on semiconducto...
- Patent number 11,121,093
- Issue date Sep 14, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yue-Lin Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for ring frame cleaning and inspection
- Patent number 11,004,720
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated transfer and drying tool for process chamber
- Patent number 10,991,625
- Issue date Apr 27, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsung-Sheng Kuo
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Grant
Device positioning using sensors
- Patent number 10,971,386
- Issue date Apr 6, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Yan-Han Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for substrate inspection
- Patent number 10,876,976
- Issue date Dec 29, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Bo-Han Shih
- G01 - MEASURING TESTING
Information Patent Grant
Automatic in-line inspection system
- Patent number 10,872,794
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Ko Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
EFEM robot auto teaching methodology
- Patent number 10,861,723
- Issue date Dec 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor equipment management method, electronic device, and n...
- Patent number 10,852,704
- Issue date Dec 1, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sing-Tsung Li
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR RAISED FLOOR AUTOMATED SENSOR VEHICLES
- Publication number 20240377826
- Publication date Nov 14, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Cheng-Kang HU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCT...
- Publication number 20240327985
- Publication date Oct 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Shiung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EFEM ROBOT AUTO TEACHING METHODOLOGY
- Publication number 20240249961
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS
- Publication number 20240186162
- Publication date Jun 6, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Cheng-Kang HU
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION
- Publication number 20230386887
- Publication date Nov 30, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MULTI-SPRAY RRC PROCESS WITH DYNAMIC CONTROL
- Publication number 20230221645
- Publication date Jul 13, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Ming-Hsuan CHUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM WAFER CHUCK FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20220415699
- Publication date Dec 29, 2022
- TAIWAN SEMICONDUTOR MANUFACTURING CO., LTD.
- Chien-Fa LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT OFFSET CORRECTION
- Publication number 20220375057
- Publication date Nov 24, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chien-Ko LIAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCT...
- Publication number 20220333246
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Shiung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR RAISED FLOOR AUTOMATED SENSOR VEHICLES
- Publication number 20220261001
- Publication date Aug 18, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Cheng-Kang HU
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATED INSPECTION TOOL
- Publication number 20220059415
- Publication date Feb 24, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Han Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VACUUM WAFER CHUCK FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20220059393
- Publication date Feb 24, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING CO, LTD.
- Chien-Fa LEE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHOD AND SYSTEM FOR MAP-FREE INSPECTION OF SEMICONDUCTOR DEVICES
- Publication number 20220059376
- Publication date Feb 24, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Becky LIAO
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION
- Publication number 20210257247
- Publication date Aug 19, 2021
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED TRANSFER AND DRYING TOOL FOR PROCESS CHAMBER
- Publication number 20210242085
- Publication date Aug 5, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE POSITIONING USING SENSORS
- Publication number 20210082718
- Publication date Mar 18, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Yan-Han CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR EQUIPMENT MANAGEMENT METHOD, ELECTRONIC DEVICE, AND N...
- Publication number 20210063984
- Publication date Mar 4, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sing-Tsung Li
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OFFSET CORRECTION
- Publication number 20210065347
- Publication date Mar 4, 2021
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chien-Ko LIAO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EFEM ROBOT AUTO TEACHING METHODOLOGY
- Publication number 20210043481
- Publication date Feb 11, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Chien-Fa LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS
- Publication number 20200343115
- Publication date Oct 29, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Cheng-Kang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CHIP DIE CARRIER EXCHANGER
- Publication number 20200251367
- Publication date Aug 6, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chien-Fa Lee
- B08 - CLEANING
Information Patent Application
AUTOMATED TRANSFER AND DRYING TOOL FOR PROCESS CHAMBER
- Publication number 20200243393
- Publication date Jul 30, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MULTI-SPRAY RRC PROCESS WITH DYNAMIC CONTROL
- Publication number 20200192225
- Publication date Jun 18, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Ming-Hsuan CHUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR DETECTING MICRO-ARCING OCCURRING INSIDE A SEMICONDUC...
- Publication number 20200111652
- Publication date Apr 9, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Feng-Kuang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR SUBSTRATE INSPECTION
- Publication number 20200072760
- Publication date Mar 5, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- BO-HAN SHIH
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATED INSPECTION TOOL
- Publication number 20200043812
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chia-Han Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MINI IDENTIFICATION MARK
- Publication number 20200013726
- Publication date Jan 9, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Yue-Lin Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION
- Publication number 20190363002
- Publication date Nov 28, 2019
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOPOLOGICAL SCANNING METHOD AND SYSTEM
- Publication number 20190244343
- Publication date Aug 8, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Sheng-Hsiang CHUANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR EQUIPMENT MANAGEMENT METHOD, ELECTRONIC DEVICE, AND N...
- Publication number 20190163149
- Publication date May 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sing-Tsung Li
- G05 - CONTROLLING REGULATING

Shou-Wen Kuo

Person

Patents Grantslast 30 patents

Method and apparatus for multi-spray RRC process with dynamic control

Vacuum wafer chuck for manufacturing semiconductor devices

System and method for ring frame cleaning and inspection

Systems and methods for raised floor automated sensor vehicles

Gas tube, gas supply system and manufacturing method of semiconduct...

EFEM robot auto teaching methodology

Automated inspection tool

Apparatus and method for inspecting wafer carriers

Defect offset correction

System and method for ring frame cleaning and inspection

Semiconductor equipment management method, electronic device, and n...

Automated transfer and drying tool for process chamber

Method and system for map-free inspection of semiconductor devices

Method and apparatus for multi-spray RRC process with dynamic control

Integrated chip die carrier exchanger

Vacuum wafer chuck for manufacturing semiconductor devices

Defect offset correction

Gas tube, gas supply system and manufacturing method of semiconduct...

Systems and methods for raised floor automated sensor vehicles

Automated inspection tool

Semiconductor processing stage profiler jig

Topological scanning method and system

Methods for selectively forming identification mark on semiconducto...

System and method for ring frame cleaning and inspection

Automated transfer and drying tool for process chamber

Device positioning using sensors

Apparatus and method for substrate inspection

Automatic in-line inspection system

EFEM robot auto teaching methodology

Semiconductor equipment management method, electronic device, and n...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR RAISED FLOOR AUTOMATED SENSOR VEHICLES

GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCT...

EFEM ROBOT AUTO TEACHING METHODOLOGY

APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS

SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION

METHOD AND APPARATUS FOR MULTI-SPRAY RRC PROCESS WITH DYNAMIC CONTROL

VACUUM WAFER CHUCK FOR MANUFACTURING SEMICONDUCTOR DEVICES

DEFECT OFFSET CORRECTION

GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCT...

SYSTEMS AND METHODS FOR RAISED FLOOR AUTOMATED SENSOR VEHICLES

AUTOMATED INSPECTION TOOL

VACUUM WAFER CHUCK FOR MANUFACTURING SEMICONDUCTOR DEVICES

METHOD AND SYSTEM FOR MAP-FREE INSPECTION OF SEMICONDUCTOR DEVICES

SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION

AUTOMATED TRANSFER AND DRYING TOOL FOR PROCESS CHAMBER

DEVICE POSITIONING USING SENSORS

SEMICONDUCTOR EQUIPMENT MANAGEMENT METHOD, ELECTRONIC DEVICE, AND N...

DEFECT OFFSET CORRECTION

EFEM ROBOT AUTO TEACHING METHODOLOGY

APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS

INTEGRATED CHIP DIE CARRIER EXCHANGER

AUTOMATED TRANSFER AND DRYING TOOL FOR PROCESS CHAMBER

METHOD AND APPARATUS FOR MULTI-SPRAY RRC PROCESS WITH DYNAMIC CONTROL

TECHNIQUES FOR DETECTING MICRO-ARCING OCCURRING INSIDE A SEMICONDUC...

APPARATUS AND METHOD FOR SUBSTRATE INSPECTION

AUTOMATED INSPECTION TOOL

MINI IDENTIFICATION MARK

SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION

TOPOLOGICAL SCANNING METHOD AND SYSTEM

SEMICONDUCTOR EQUIPMENT MANAGEMENT METHOD, ELECTRONIC DEVICE, AND N...