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Shoudeng Liang
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
High performance EUV mask
Patent number
6,905,801
Issue date
Jun 14, 2005
Intel Corporation
Shoudeng Liang
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Photolithographic mask fabrication
Patent number
6,627,362
Issue date
Sep 30, 2003
Intel Corporation
Alan R. Stivers
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
High performance EUV mask
Publication number
20040126670
Publication date
Jul 1, 2004
Shoudeng Liang
B82 - NANO-TECHNOLOGY
Information
Patent Application
Photolithographic mask fabrication
Publication number
20030082460
Publication date
May 1, 2003
Alan R. Stivers
B82 - NANO-TECHNOLOGY