Shouhong Tang

Person

Tucson, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for wafer structure uniformity monitoring using...
- Patent number 10,352,691
- Issue date Jul 16, 2019
- KLA-Tencor Corporation
- Haiguang Chen
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus to fold optics in tools for measuring shape an...
- Patent number 9,903,708
- Issue date Feb 27, 2018
- KLA-Tencor Corporation
- Chunhai Wang
- G02 - OPTICS
Information Patent Grant
Systems and methods for wafer surface feature detection and quantif...
- Patent number 9,702,829
- Issue date Jul 11, 2017
- KLA-Tencor Corporation
- Haiguang Chen
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus to fold optics in tools for measuring shape an...
- Patent number 9,279,663
- Issue date Mar 8, 2016
- KLA-Tencor Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Grant
Reducing registration error of front and back wafer surfaces utiliz...
- Patent number 9,163,928
- Issue date Oct 20, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Method for reducing wafer shape and thickness measurement errors re...
- Patent number 9,121,684
- Issue date Sep 1, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of thickness variation and shape of wafers
- Patent number 9,074,873
- Issue date Jul 7, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring shape and thickness variation of...
- Patent number 9,019,491
- Issue date Apr 28, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Method for compensating for wafer shape measurement variation due t...
- Patent number 8,949,057
- Issue date Feb 3, 2015
- KLA-Tencor Corporation
- Kibyung Seong
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for improved localized feature quantification i...
- Patent number 8,630,479
- Issue date Jan 14, 2014
- KLA-Tencor Corporation
- Haiguang Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for improving the temperature stability and mi...
- Patent number 8,621,945
- Issue date Jan 7, 2014
- KLA Tencor
- An Andrew Zeng
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for measuring the shape and thickness variatio...
- Patent number 8,537,369
- Issue date Sep 17, 2013
- KLA Tencor
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring shape or thickness information o...
- Patent number 8,068,234
- Issue date Nov 29, 2011
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Measuring the shape and thickness variation of a wafer with high sl...
- Patent number 7,847,954
- Issue date Dec 7, 2010
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Measuring the shape, thickness variation, and material inhomogeneit...
- Patent number 7,667,852
- Issue date Feb 23, 2010
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of the top surface of an object with/without transparen...
- Patent number 7,595,891
- Issue date Sep 29, 2009
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for optically analyzing a surface
- Patent number 7,583,386
- Issue date Sep 1, 2009
- KLA-Tencor Corporation
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Grant
Temporal interferometric signal modeling with constant phase shift...
- Patent number 7,538,887
- Issue date May 26, 2009
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for optically analyzing a surface
- Patent number 7,428,056
- Issue date Sep 23, 2008
- KLA-Tencor Technologies Corporation
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for optically analyzing a surface
- Patent number 7,408,649
- Issue date Aug 5, 2008
- KLA-Tencor Technologies Corporation
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Grant
Weighted least-square interferometric measurement of multiple surfaces
- Patent number 6,885,461
- Issue date Apr 26, 2005
- Phase Shift Technology, Inc.
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Non linear phase shift calibration for interferometric measurement...
- Patent number 6,856,405
- Issue date Feb 15, 2005
- Phase Shift Technology, Inc.
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring the shape and thickness variatio...
- Patent number 6,847,458
- Issue date Jan 25, 2005
- Phase Shift Technology, Inc.
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Grant
Sheet flatness measurement system and method
- Patent number 5,471,307
- Issue date Nov 28, 1995
- Phase Shift Technology, Inc.
- Chris L. Koliopoulos
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus to Fold Optics in Tools for Measuring Shape an...
- Publication number 20160265904
- Publication date Sep 15, 2016
- KLA-Tencor Corporation
- Chunhai Wang
- G02 - OPTICS
Information Patent Application
REDUCING REGISTRATION ERROR OF FRONT AND BACK WAFER SURFACES UTILIZ...
- Publication number 20150192404
- Publication date Jul 9, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
A DUAL INTERFEROMETER SYSTEM WITH A SHORT REFERENCE FLAT DISTANCE F...
- Publication number 20150176973
- Publication date Jun 25, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Reducing Registration Error of Front and Back Wafer Surfaces Utiliz...
- Publication number 20140313516
- Publication date Oct 23, 2014
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Wafer Shape and Thickness Measurement System Utilizing Shearing Int...
- Publication number 20140293291
- Publication date Oct 2, 2014
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS TO FOLD OPTICS IN TOOLS FOR MEASURING SHAPE AN...
- Publication number 20140029016
- Publication date Jan 30, 2014
- KLA-Tencor Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING SHAPE AND THICKNESS VARIATION OF...
- Publication number 20130188179
- Publication date Jul 25, 2013
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Method for Reducing Wafer Shape and Thickness Measurement Errors Re...
- Publication number 20130182262
- Publication date Jul 18, 2013
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR IMPROVED LOCALIZED FEATURE QUANTIFICATION I...
- Publication number 20120177282
- Publication date Jul 12, 2012
- KLA-Tencor Corporation
- Haiguang Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPAATUS FOR IMPROVING THE TEMPERATURE STABILITY AND MIN...
- Publication number 20120118061
- Publication date May 17, 2012
- KLA-Tencor Corporation
- An Andrew Zeng
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING SHAPE OR THICKNESS INFORMATION O...
- Publication number 20100208272
- Publication date Aug 19, 2010
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
MEASURING THE SHAPE AND THICKNESS VARIATION OF A WAFER WITH HIGH SL...
- Publication number 20090284734
- Publication date Nov 19, 2009
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR OPTICALLY ANALYZING A SURFACE
- Publication number 20080304078
- Publication date Dec 11, 2008
- KLA-Tencor Technologies Corporation
- Klaus Freishlad
- G01 - MEASURING TESTING
Information Patent Application
MEASURING THE SHAPE, THICKNESS VARIATION, AND MATERIAL INHOMOGENEIT...
- Publication number 20080285053
- Publication date Nov 20, 2008
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for optically analyzing a surface
- Publication number 20070091317
- Publication date Apr 26, 2007
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Application
Method & apparatus for optically analyzing a surface
- Publication number 20070091318
- Publication date Apr 26, 2007
- Klaus Freishlad
- G01 - MEASURING TESTING
Information Patent Application
Measurement of the top surface of an object with/without transparen...
- Publication number 20070008551
- Publication date Jan 11, 2007
- Phase Shift Technology, Inc.
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for measuring the shape and thickness variatio...
- Publication number 20040184038
- Publication date Sep 23, 2004
- Phase Shift Technology, Inc.
- Klaus Freischlad
- G01 - MEASURING TESTING
Information Patent Application
Non linear phase shift calibration for interferometric measurement...
- Publication number 20040174526
- Publication date Sep 9, 2004
- Phase Shift Technology, Inc.
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Weighted least-square interferometric measurement of multiple surfaces
- Publication number 20040105097
- Publication date Jun 3, 2004
- Phase Shift Technology
- Shouhong Tang
- G01 - MEASURING TESTING

Shouhong Tang

Person

Patents Grantslast 30 patents

Systems and methods for wafer structure uniformity monitoring using...

Method and apparatus to fold optics in tools for measuring shape an...

Systems and methods for wafer surface feature detection and quantif...

Method and apparatus to fold optics in tools for measuring shape an...

Reducing registration error of front and back wafer surfaces utiliz...

Method for reducing wafer shape and thickness measurement errors re...

Measurement of thickness variation and shape of wafers

Method and apparatus for measuring shape and thickness variation of...

Method for compensating for wafer shape measurement variation due t...

Methods and systems for improved localized feature quantification i...

Method and apparatus for improving the temperature stability and mi...

Method and apparatus for measuring the shape and thickness variatio...

Method and apparatus for measuring shape or thickness information o...

Measuring the shape and thickness variation of a wafer with high sl...

Measuring the shape, thickness variation, and material inhomogeneit...

Measurement of the top surface of an object with/without transparen...

Method and apparatus for optically analyzing a surface

Temporal interferometric signal modeling with constant phase shift...

Method and apparatus for optically analyzing a surface

Method and apparatus for optically analyzing a surface

Weighted least-square interferometric measurement of multiple surfaces

Non linear phase shift calibration for interferometric measurement...

Method and apparatus for measuring the shape and thickness variatio...

Sheet flatness measurement system and method

Patents Applicationslast 30 patents

Method and Apparatus to Fold Optics in Tools for Measuring Shape an...

REDUCING REGISTRATION ERROR OF FRONT AND BACK WAFER SURFACES UTILIZ...

A DUAL INTERFEROMETER SYSTEM WITH A SHORT REFERENCE FLAT DISTANCE F...

Reducing Registration Error of Front and Back Wafer Surfaces Utiliz...

Wafer Shape and Thickness Measurement System Utilizing Shearing Int...

METHOD AND APPARATUS TO FOLD OPTICS IN TOOLS FOR MEASURING SHAPE AN...

METHOD AND APPARATUS FOR MEASURING SHAPE AND THICKNESS VARIATION OF...

Method for Reducing Wafer Shape and Thickness Measurement Errors Re...

METHODS AND SYSTEMS FOR IMPROVED LOCALIZED FEATURE QUANTIFICATION I...

METHOD AND APPAATUS FOR IMPROVING THE TEMPERATURE STABILITY AND MIN...

METHOD AND APPARATUS FOR MEASURING SHAPE OR THICKNESS INFORMATION O...

MEASURING THE SHAPE AND THICKNESS VARIATION OF A WAFER WITH HIGH SL...

METHOD AND APPARATUS FOR OPTICALLY ANALYZING A SURFACE

MEASURING THE SHAPE, THICKNESS VARIATION, AND MATERIAL INHOMOGENEIT...

Method and apparatus for optically analyzing a surface

Method & apparatus for optically analyzing a surface

Measurement of the top surface of an object with/without transparen...

Method and apparatus for measuring the shape and thickness variatio...

Non linear phase shift calibration for interferometric measurement...

Weighted least-square interferometric measurement of multiple surfaces