Shouichi Shimose

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Hikami-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Two-fluid nozzle for cleaning substrate and substrate cleaning appa...
- Patent number 8,037,891
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Itaru Kanno
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
Two-fluid nozzle for cleaning substrate and substrate cleaning appa...
- Publication number 20070141849
- Publication date Jun 21, 2007
- TOKYO ELECTRON LIMITED
- Itaru Kanno
- B08 - CLEANING