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Shouji Okiguchi
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Kudamatsu, JP
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last 30 patents
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Patent Grant
Vacuum processing apparatus
Patent number
8,731,706
Issue date
May 20, 2014
Hitachi High-Technologies Corporation
Shingo Kimura
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20100068009
Publication date
Mar 18, 2010
Shingo Kimura
H01 - BASIC ELECTRIC ELEMENTS