Shouji Okiguchi

Person

  • Kudamatsu, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Vacuum processing apparatus

    • Patent number 8,731,706
    • Issue date May 20, 2014
    • Hitachi High-Technologies Corporation
    • Shingo Kimura
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    VACUUM PROCESSING APPARATUS

    • Publication number 20100068009
    • Publication date Mar 18, 2010
    • Shingo Kimura
    • H01 - BASIC ELECTRIC ELEMENTS