Shoulong Zhang

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Shanghai, CN

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Patents Applicationslast 30 patents

Information Patent Application
Method for Adjusting Metal Polishing Rate and Reducing Defects Aris...
- Publication number 20120276820
- Publication date Nov 1, 2012
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Shoulong Zhang
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR POST-CMP WAFER SURFACE CLEANING
- Publication number 20080078420
- Publication date Apr 3, 2008
- Semiconductor Manufacturing International (Shanghai) Corporation
- Jing Wen
- B08 - CLEANING