ShouQian Shao

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Boston, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Particle trap for a plasma source
- Patent number 7,914,603
- Issue date Mar 29, 2011
- MKS Instruments, Inc.
- Ali Shajii
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Toroidal low-field reactive gas and plasma source having a dielectr...
- Patent number 7,501,600
- Issue date Mar 10, 2009
- MKS Instruments, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal low-field reactive gas and plasma source having a dielectr...
- Patent number 6,872,909
- Issue date Mar 29, 2005
- Applied Science and Technology, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE TRAP FOR A PLASMA SOURCE
- Publication number 20090320677
- Publication date Dec 31, 2009
- MKS Instruments, Inc.
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectr...
- Publication number 20070145023
- Publication date Jun 28, 2007
- MKS Instruments, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal low-field reactive gas and plasma source having a dielectr...
- Publication number 20050145173
- Publication date Jul 7, 2005
- MKS Instruments, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal low-field reactive gas and plasma source having a dielectr...
- Publication number 20040206730
- Publication date Oct 21, 2004
- Applied Science & Technology
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS