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Tsukui-Gun, JP
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last 30 patents
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Patent Grant
Heat treatment apparatus having a thin light-transmitting window
Patent number
6,437,290
Issue date
Aug 20, 2002
Tokyo Electron Limited
Shouqian Shao
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
Heat treatment apparatus having a thin light-transmitting window
Publication number
20020030047
Publication date
Mar 14, 2002
Shouqian Shao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...