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Shoutarou TAMAYAMA
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Charged particle beam apparatus and program
Patent number
9,412,557
Issue date
Aug 9, 2016
Hitachi High-Technologies Corporation
Mitsugu Yamashita
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
Charged Particle Beam Apparatus and Program
Publication number
20150325408
Publication date
Nov 12, 2015
Hitachi High-Technologies Corporation
Mitsugu YAMASHITA
H01 - BASIC ELECTRIC ELEMENTS