Shoyo Fujita

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Patents Grantslast 30 patents

Information Patent Grant
Sputtering process and an apparatus for carrying out the same
- Patent number 4,963,239
- Issue date Oct 16, 1990
- Hitachi, Ltd.
- Hideaki Shimamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...